Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Masanobu Onodera"'
Autor:
Shinichi Ishibashi, Michitaka Takasaki, Migaku Takahashi, Masanobu Onodera, Yoshito Ashizawa, Shin Saito
Publikováno v:
Journal of the Vacuum Society of Japan. 53:521-526
Concept of ultra clean (UC) dry-process proposed by present authors in 1990s has been widely used in various thin film fabrication fields from the view point of research as well as volume production stages of electronic devices. Original basic concep
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d9276312cfb771a3c8848d792d02369b
https://doi.org/10.3131/jvsj2.53.521
https://doi.org/10.3131/jvsj2.53.521
Publikováno v:
Journal of The Electrochemical Society. 141:192-205
The surface of positive photoresist is hardened by the ion implantation process and becomes very difficult to remove thereafter. To investigate this phenomenon, the following aspects of photoresist were investigated: (i) the effectiveness of low‐en
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::913f8d28f2a8cbdc6c642a148fa19a42
https://doi.org/10.1149/1.2054683
https://doi.org/10.1149/1.2054683
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 6:269-273
Addition of appropriate surfactant to developer will improve wettability of the developer, thus promoting uniformity of dissolution of exposed photoresist. Surface smoothness of the Si substrate is also improved when developer contains surfactant. Th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::812c3e5a3e587788885ee4be07d90434
https://doi.org/10.1109/66.238177
https://doi.org/10.1109/66.238177
Publikováno v:
Journal of The Electrochemical Society. 139:1721-1730
The addition of small amounts of surfactant and hydrogen peroxide (H 2 O 2 ) to the developer is shown to improve the performance of the photoresist development process. Exposed photoresist areas are dissolved more uniformly, the smoothness of Si sur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::00157985d74574f6f21b938769daf1c1
https://doi.org/10.1149/1.2069483
https://doi.org/10.1149/1.2069483
Publikováno v:
Advances in Resist Technology and Processing XI.
We have demonstrated that highly reliable resist patterning is achieved by effectively removing reaction products by means of ultrasonic development and the addition of surfactant to the developer. It has been found that the reaction products form a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bcf4135a751c5b6054539bdfccfd16ed
https://doi.org/10.1117/12.175394
https://doi.org/10.1117/12.175394
Publikováno v:
Extended Abstracts of the 1992 International Conference on Solid State Devices and Materials.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1f254c1682681e0200c06c5e75950b13
https://doi.org/10.7567/ssdm.1992.pd3-7
https://doi.org/10.7567/ssdm.1992.pd3-7
Publikováno v:
Japanese Journal of Applied Physics. 33:491
Formation of high-precision fine resist patterns has been achieved by an effective removal of dissolved resist polymers, that is, the reaction products of the development process. Also, it has been found that the reaction products give rise to the de
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::838d28485fdb8dbbb1786f4bc4105189
https://doi.org/10.1143/jjap.33.491
https://doi.org/10.1143/jjap.33.491
Publikováno v:
The Journal of the Institute of Television Engineers of Japan. 40:984-990
先に提案したマイクロカラーフィルタ型フルカラー液晶ディスプレイ (LCD) は多くの研究開発者の努力ですでに実用レベルに達しているが, 一部でバックライトの消費電力が重要な問題と
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d037af93347dedc70cad520b9b5e2724
https://doi.org/10.3169/itej1978.40.984
https://doi.org/10.3169/itej1978.40.984
Autor:
Hiroshi Kogo, Norihisa Inazu, Yoshio Aizawa, Kenji Yamada, Tadahiro Matsudaira, Masanobu Onodera
Publikováno v:
Japanese Journal of Pharmacology. 33:282
A micro high-performance liquid chromatographic method for the determination of prostaglandin E2 (PGE2) and the main prostaglandin E metabolite(PGEMT) in rat organs and human urine has been developed. Prednisolone was added to the sample as the inter
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::38169e258fa5dcff94e9c6033ae4e0f8
https://doi.org/10.1016/s0021-5198(19)64894-8
https://doi.org/10.1016/s0021-5198(19)64894-8
Autor:
Hiroshi Kogo, Norihisa Inazu, Masanobu Onodera, Tadahiro Matsudaira, Kenji Yamada, Yoshio Aizawa
Publikováno v:
Japanese Journal of Pharmacology. 36:345
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cb24d66f643c04c1240919f066eaf35a
https://doi.org/10.1016/s0021-5198(19)62896-9
https://doi.org/10.1016/s0021-5198(19)62896-9