Zobrazeno 1 - 10
of 20
pro vyhledávání: '"Masami Kakuchi"'
Publikováno v:
Microelectronic Engineering. 13:251-254
X-ray masks with four sub-half-micron 1M-DRAM chips have been fabricated for four lithography levels. A four-level mask-to-mask overlay accuracy of higher than 0.13 μm (3σ) was obtained. In these masks, the distance between chip boundaries and wind
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2508bd782b81069fac2d5369a6fe5b0b
https://doi.org/10.1016/0167-9317(91)90086-s
https://doi.org/10.1016/0167-9317(91)90086-s
Publikováno v:
Microelectronic Engineering. 11:241-244
The ECR plasma CVD system has been improved for depositing SiC films for X-ray mask membranes. This system makes it possible to deposit SiC films with small tensile stress, high optical transparency and high strength at temperatures below 800°C. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a456d011b699d6d9d7ca059f4d86a06d
https://doi.org/10.1016/0167-9317(90)90106-4
https://doi.org/10.1016/0167-9317(90)90106-4
Publikováno v:
Japanese Journal of Applied Physics. 29:L172
It is of great importance to understand image formation by zone plates (ZP's) in X-ray microscopy using ZP's as optical devices. Image formation by a ZP is diagrammatically analyzed. First, an object is illuminated by a monochromatic plane wave. It i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1e894527a9418b7af253e78e91bb0e93
https://doi.org/10.1143/jjap.29.l172
https://doi.org/10.1143/jjap.29.l172
Publikováno v:
Macromolecules. 20:749-753
Polymerisation electrolytique de pyrrole sur une electrode de verre revetu d'un film de 20 μm de PVC ou de copolymere fluorure de vinylidene/trifluoroethylene
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::998b3f09dec5097381b3b26a5d24e486
https://doi.org/10.1021/ma00170a008
https://doi.org/10.1021/ma00170a008
Autor:
Misao Sekimoto, Yasushi Kagoshima, Masami Ando, Hideki Maezawa, Kazuyuki Hyodo, Sadao Aoki, Masami Kakuchi
Publikováno v:
Review of Scientific Instruments. 60:2448-2451
A soft x‐ray microscope using Fresnel zone plates as optical imaging elements was installed at the Photon Factory. It makes use of undulator radiation as a source of soft x rays ranging from 2.0 to 3.0 nm in wavelength. The optical system was desig
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8200d1e2c84586782d993c5c675ad819
https://doi.org/10.1063/1.1140695
https://doi.org/10.1063/1.1140695
Publikováno v:
Review of Scientific Instruments. 60:2295-2298
A new soft x‐ray plate of Ag/chalcogenide film is proposed, which offers in situ monitoring of high‐resolution x‐ray images. Soft x‐ray exposure of synchrotron and undulator radiation causes color change in the Ag/chalcogenide film, capable o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7361da3fc14de907348deef92d7c2a10
https://doi.org/10.1063/1.1140797
https://doi.org/10.1063/1.1140797
Publikováno v:
Polymer Journal. 19:1293-1301
The electrochemical polymerization of pyrrole on an electrode covered with an insulating polymer film produces conducting polymer alloy films of polypyrrole (PPy) and insulating polymer. By using vinylidene fluoride-trifluoroethylene copolymer (P(VDF
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2fb9eff2d141b49281d95209257bb9b5
https://doi.org/10.1295/polymj.19.1293
https://doi.org/10.1295/polymj.19.1293
Publikováno v:
Journal of The Electrochemical Society. 124:1648-1651
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8152e300315f9404ed6f0c87a1d6f809
https://doi.org/10.1149/1.2133127
https://doi.org/10.1149/1.2133127
Publikováno v:
Applied Physics Letters. 48:835-837
We propose the application of carbon films as resist masks for practical nanometer lithography involving reactive ion etching (RIE). Amorphous carbon films prepared by room‐temperature plasma chemical vapor deposition show a very high resistance ag
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0e7bc0690b21632da41ebe4eb049e3a1
https://doi.org/10.1063/1.96683
https://doi.org/10.1063/1.96683
Publikováno v:
Springer Series in Optical Sciences ISBN: 9783662144909
X-ray microscope is an useful tool in biology because of the advantages of an inherent contrast mechanism. The performance of an x-ray microscope depends on the quality of its zone plates. The requirements for zone plate material are 1) x-ray absorpt
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d3aef9b08ac0c00f63432d90f7f7ca4f
https://doi.org/10.1007/978-3-540-39246-0_32
https://doi.org/10.1007/978-3-540-39246-0_32
