Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Masaki Chikahisa"'
Publikováno v:
IEICE Transactions on Information and Systems. :1150-1160
Publikováno v:
Image and Vision Computing. 25:1117-1123
We propose an analytical estimation method of the electron probe profile from an SEM image through the wavelet analysis of the multiscale information for inline SEM inspection. Defocused electron probe profiles are calculated based on wave optical th
Publikováno v:
WCRE
We herein propose Program-oriented Modeling (POM), a novel approach to extract software models automatically from source code. The proposed approach is developed in order to satisfy the requirements of model abstraction for situations in which a mode
Publikováno v:
Machine Vision Applications in Industrial Inspection XI.
We have tried to estimate the electron beam profile from a scanning electron microscope (SEM) image by using Wavelet multiresolution analysis for in-process SEM inspection. At first, an ideal secondary electron (SE) profile for step edge is calculate