Zobrazeno 1 - 10
of 26
pro vyhledávání: '"Masakatsu Kiyohara"'
Autor:
Ashizawa, Hiroaki1,2 (AUTHOR) hiroaki.ashizawa@jp.toto.com, Masakatsu, Kiyohara1 (AUTHOR), Yoshida, Katsumi3 (AUTHOR)
Publikováno v:
Journal of the American Ceramic Society. Dec2020, Vol. 103 Issue 12, p7031-7040. 10p. 6 Black and White Photographs, 1 Diagram, 1 Chart, 4 Graphs.
Autor:
Masakatsu Kiyohara, Hiroaki Ashizawa
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 30:357-361
Aerosol deposition (AD) method is technique for forming high density ceramic films on substrate material surface at room temperature. The yttrium oxide films formed by the AD method (AD-Y2O3 films) have been developed as plasma resistance coating use
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1082078bdd7dfd4e4d329464f09fb32e
https://doi.org/10.1109/tsm.2017.2752752
https://doi.org/10.1109/tsm.2017.2752752
Autor:
Hiroaki Ashizawa, Masakatsu Kiyohara
Publikováno v:
2016 International Symposium on Semiconductor Manufacturing (ISSM).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b702090da4141d014000f7e08e6a6e8
https://doi.org/10.1109/issm.2016.7934526
https://doi.org/10.1109/issm.2016.7934526
Publikováno v:
Journal of the Vacuum Society of Japan. 53:573-577
Aerosol Deposition Method (ADM) is a new technology of ceramics film deposition. Using this method, we can deposit various ceramics thick films (one-several hundreds micrometer of thickness) on metal, glass and ceramics substrates. It's normal temper
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::585824e910f4c373dbad943875396660
https://doi.org/10.3131/jvsj2.53.573
https://doi.org/10.3131/jvsj2.53.573
Publikováno v:
Journal of the American Ceramic Society. 90:2327-2332
Dense yttrium oxide film was prepared on a quartz substrate by the aerosol deposition process at the room temperature. The deposition rate was very high, 60 m/h. Thick film of 10 m was easily achievable on the quartz substrate. Transmission electron
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::06ee3f2ae7f60eb661f458c7bd7ddb65
https://doi.org/10.1111/j.1551-2916.2007.01738.x
https://doi.org/10.1111/j.1551-2916.2007.01738.x
Publikováno v:
Journal of the Ceramic Society of Japan. 114:272-276
Dense yttrium oxide film was prepared by aerosol deposition process at room temperature. The deposition rate was very high ~60 μm/h. The thickness of the films were 25 μm and 10 μm on aluminum alloy and quartz substrates, respectively. Transmissio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e0a6dc99b7a0a4cd42d770048ffa0f77
https://doi.org/10.2109/jcersj.114.272
https://doi.org/10.2109/jcersj.114.272
Autor:
Masakatsu Kiyohara, Jun Akedo
Publikováno v:
Journal of the Society of Powder Technology, Japan. 40:192-200
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::14bf9fba395045c6a5d2e3c2cb13ebf4
https://doi.org/10.4164/sptj.40.192
https://doi.org/10.4164/sptj.40.192
Publikováno v:
Journal of the Ceramic Society of Japan. 104:208-214
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::df329de4a99a5c1d757bcf2d4d71c32a
https://doi.org/10.2109/jcersj.104.208
https://doi.org/10.2109/jcersj.104.208
Publikováno v:
Journal of the Ceramic Society of Japan. 103:1233-1237
Electric field dependence of the strain characteristics on the (Pb, Ba, Sr) (Zr, Ti, Sn, Nb)O3 compositions were investigated. It was found that the measured strain (δ) increases with increasing applied DC electric field. The δ was larger than the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c396223fa7eeabb2186f9444a0f7b161
https://doi.org/10.2109/jcersj.103.1233
https://doi.org/10.2109/jcersj.103.1233
Autor:
Toshirou Higuchi, Masakatsu Kiyohara
Publikováno v:
Journal of the Ceramic Society of Japan. 103:39-45
The temperature dependence of piezoelectric constant (d31) and the strain characteristics of the (Pb0.845Ba0.105Sr0.05) ((ZrxTi1-x)0.95Sn0.045Nb0.005)O3 series (x=0.49, 0.52, 0.55), in which the grain size was controlled by hot-pressing (HP), were in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c606b4cc14228ae027a9d7ca4cddff2
https://doi.org/10.2109/jcersj.103.39
https://doi.org/10.2109/jcersj.103.39