Zobrazeno 1 - 10
of 22
pro vyhledávání: '"Masahiro Tsugai"'
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 125:387-392
This paper presents a new type of bidirectional thermal flow sensor which has a wide dynamic range and excellent temperature characteristics. This sensor has a pair of heaters and a temperature sensor on a diaphragm. The heaters are located on opposi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::df15aff116f5e9519d267bb8ff841b99
https://doi.org/10.1541/ieejsmas.125.387
https://doi.org/10.1541/ieejsmas.125.387
Publikováno v:
Sensors and Actuators A: Physical. 102:261-267
A micro-optical distance sensor has been developed by a combination of LIGA technology and Si micromachining in order to meet industrial demands for miniaturization and low cost. The function of the distance sensor is based on the triangulation princ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9b4a48e47662b7a7d74b00280fab4202
https://doi.org/10.1016/s0924-4247(02)00395-3
https://doi.org/10.1016/s0924-4247(02)00395-3
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 123:357-362
This paper presents a simple new configuration for a switched capacitor type C-V converter based on a charge balance principle for a differential capacitance sensor and its simulation results. The new converter was devised and realized using only one
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3f552acaee47a13523cd4c58dde26ff5
https://doi.org/10.1541/ieejsmas.123.357
https://doi.org/10.1541/ieejsmas.123.357
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 116:234-239
This paper describes a new compensation method for the temperature offset drift on the semiconductor piezoresistive sensors such as pressure sensor and accelerometer.The offset drift compensation was conventionally carried out with the method in whic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f3ee8dbc65d700e3b4d2aa2496808e99
https://doi.org/10.1541/ieejsmas.116.234
https://doi.org/10.1541/ieejsmas.116.234
Publikováno v:
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
This paper reports a newly developed z-axis capacitive accelerometer with high durability to impacts. Our accelerometer has a unique sensing mechanism by which the displacement of an inertial mass caused by an acceleration in the z-axis direction is
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1d8ac1212e72c3428ae742b81c77908f
https://doi.org/10.1109/sensor.2009.5285908
https://doi.org/10.1109/sensor.2009.5285908
Autor:
Yasuhiro Kosasayama, Keisuke Kama, Takaki Sugino, Yasuaki Ohta, Masahiro Tsugai, Hisatoshi Hata, Takanori Ohno, Takahiro Ohnakado, Masashi Ueno, Hiroshi Fukumoto
Publikováno v:
SPIE Proceedings.
We have developed a novel readout circuit architecture realizing a TEC-less (Thermo-Electric Cooler) operation for an SOI diode uncooled infrared focal plane array (IRFPA). Through the fabrication of an SOI diode uncooled 320 x 240 IRFPA adopting the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::82dc92c32684a7b8646fe4b6a1c69b0a
https://doi.org/10.1117/12.818418
https://doi.org/10.1117/12.818418
Publikováno v:
Scopus-Elsevier
This paper reports the experimental results of examining the residual stress and stress gradient of LPCVD multilayered polysilicon film according to various rapid thermal annealing (RTA) in a nitrogen atmosphere. In particular the stress gradient of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::28e27489dc5d2678314d3d11775d7e75
https://doi.org/10.1109/memsys.2002.984300
https://doi.org/10.1109/memsys.2002.984300
Publikováno v:
Transducers ’01 Eurosensors XV ISBN: 9783540421504
We report a prototype of a triple axis angular rate sensor based on a double gimbal structure with a link beam drive mechanism, which can be operated without vacuum packaging. The principle of this rate sensor is based upon the torsional reference vi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6b948d171724a04167815132257595cc
https://doi.org/10.1007/978-3-642-59497-7_109
https://doi.org/10.1007/978-3-642-59497-7_109
Autor:
Jürgen Mohr, Akihide Shiratsuki, Toru Oka, Ulrike Wallrabe, Hajime Nakajima, Peter Krippner, Uwe Hollenbach, Masahiro Tsugai
Publikováno v:
Transducers ’01 Eurosensors XV ISBN: 9783540421504
A micro-optical distance sensor has been developed by a combination of LIGA technology and Si micro machining in order to meet industrial demands for miniaturization. The function of the distance sensor is based on the triangulation principle.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9b28fbef9bca220b7366d18b86fc9dae
https://doi.org/10.1007/978-3-642-59497-7_127
https://doi.org/10.1007/978-3-642-59497-7_127
Autor:
Yasuo Yamaguchi, Teruo Usami, Koji Tanimoto, Kunihiro Nakamura, Hiroshi Otani, Yoshiaki Hirata, Masahiro Tsugai
Publikováno v:
SPIE Proceedings.
We have investigated the effects of metal impurities and thermal oxidation process on Si anisotropic KOH etching characteristics for fabricating microsensors and microactuators having precise deep narrow grooves or channels. The effect of metal impur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::707fe5237438b4b0e3efdcb96f415a22
https://doi.org/10.1117/12.361231
https://doi.org/10.1117/12.361231