Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Masahiro Horigome"'
Autor:
Hirokazu Ueda, Ventzek, Peter L. G., Masahiro Oka, Masahiro Horigome, Yuuki Kobayashi, Yasuhiro Sugimoto, Toshihisa Nozawa, Satoru Kawakami
Publikováno v:
Journal of Applied Physics; 2014, Vol. 115 Issue 21, p214904-1-214904-8, 8p
Autor:
Yasuhiro Sugimoto, Hirokazu Ueda, Peter L. G. Ventzek, Yuuki Kobayashi, Satoru Kawakami, Masahiro Horigome, Masahiro Oka, Toshihisa Nozawa
Publikováno v:
Journal of Applied Physics. 115:214904
Fin extension doping for 10 nm front end of line technology requires ultra-shallow high dose conformal doping. In this paper, we demonstrate a new radial line slot antenna plasma source based doping process that meets these requirements. Critical to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8f8eef59212b5551af65b51b86c877da
https://doi.org/10.1063/1.4881075
https://doi.org/10.1063/1.4881075
Publikováno v:
The Analyst. 109:1043-1045
An extraction-spectrophotometric determination of copper with 2,2′-biquinolyl and tetrabromophenolphthalein ethyl ester (TBPE) is described. The copper-2,2′-biquinolyl complex in 1,2-dichloroethane forms a blue ion complex with TBPE in an aqueous
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1da521b584e5dca40b83c2b2c3f9ca6b
https://doi.org/10.1039/an9840901043
https://doi.org/10.1039/an9840901043