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pro vyhledávání: '"Marylène Roux"'
Autor:
François M. d'Heurle, Marylène Roux, Christian Lavoie, Cyril Cabral, Aliette Mouroux, James Mckell Edwin Harper, Shi-Li Zhang
Publikováno v:
Journal of Applied Physics. 86:2323-2329
We present measurements of the pseudobinary phase diagram of the TiSi2–NbSi2 system. This disilicide system has recently become important because of the enhanced formation of the low resistivity C54 phase of TiSi2 by addition of Nb. The solubility
Autor:
Katayun Barmak, Kevin Coffey
Metallic films play an important role in modern technologies such as integrated circuits, information storage, displays, sensors, and coatings. Metallic Films for Electronic, Optical and Magnetic Applications reviews the structure, processing and pro