Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Maryana Escalante-Marun"'
Autor:
Frank Staals, Benny Gosali, Francois Furthner, Chih-Ming Ke, Desmond Ngo, Jia-Rui Hu, Maryana Escalante Marun, Ward Tu, Robin Tijssen, Christian Marinus Leewis, Martijn van Veen, Ying-Yu Chen, Stuart Young, Vincent Huang, K. H. Chen, Frankie Tsai, Kaustuve Bhattacharyya, Brian Lee, C. H. Liao, Carlo Cornelis Maria Luijten, Marc Noot
Publikováno v:
SPIE Proceedings.
In advanced optical lithography the requirements of focus control continues to tighten. Usable depth of focus (DoF) is already quite low due to typical sources of focus errors, such as topography, wafer warpage and the thickness of photoresist. And n
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a7ba0c5fc3124d3fa3b7e4e4df6204a
https://doi.org/10.1117/12.2220373
https://doi.org/10.1117/12.2220373
Autor:
Stefan Giselbrecht, H.V. Unadkat, Bernke J. Papenburg, Roman Truckenmüller, Jan de Boer, Matthias Wessling, Volker Saile, Dimitrios Stamatialis, Max N.W. Groenendijk, Nicolas C. Rivron, Albert van den Berg, Vinod Subramaniam, Clemens van Blitterswijk, Maryana Escalante-Marun
Publikováno v:
Biomedical Microdevices, 14(1), 95-107. Kluwer Academic Publishers
Biomedical microdevices, 14(1), 95-107. Kluwer Academic Publishers
Biomedical Microdevices
Truckenmüller, R, Giselbrecht, S, Escalante-Marun, M, Groenendijk, M, Papenburg, B, Rivron, N, Unadkat, H, Saile, V, Subramaniam, V, van den Berg, A, van Blitterswijk, C, Wessling, M, Boer, J D & Stamatialis, D 2012, ' Fabrication of cell container arrays with overlaid surface topographies ', Biomedical Microdevices, vol. 14, no. 1, pp. 95-107 . https://doi.org/10.1007/s10544-011-9588-5
Biomedical Microdevices, 14, 1, pp. 95-107
Biomedical Microdevices, 14, 95-107
Biomedical microdevices, 14(1), 95-107. Kluwer Academic Publishers
Biomedical Microdevices
Truckenmüller, R, Giselbrecht, S, Escalante-Marun, M, Groenendijk, M, Papenburg, B, Rivron, N, Unadkat, H, Saile, V, Subramaniam, V, van den Berg, A, van Blitterswijk, C, Wessling, M, Boer, J D & Stamatialis, D 2012, ' Fabrication of cell container arrays with overlaid surface topographies ', Biomedical Microdevices, vol. 14, no. 1, pp. 95-107 . https://doi.org/10.1007/s10544-011-9588-5
Biomedical Microdevices, 14, 1, pp. 95-107
Biomedical Microdevices, 14, 95-107
This paper presents cell culture substrates in the form of microcontainer arrays with overlaid surface topographies, and a technology for their fabrication. The new fabrication technology is based on microscale thermoforming of thin polymer films who
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::990d0230e4c85464f6402193de0a9c21
https://hdl.handle.net/2066/107867
https://hdl.handle.net/2066/107867
Autor:
Maryana Escalante Marun, Steven Welch, Frank Staals, Stuart Young, Stefan Geerte Kruijswijk, Stefan Petra, Bart Segers, Arie Jeffrey Den Boef, Bastiaan Onne Fagginger Auer, Wei Guo, Hugo Augustinus Joseph Cramer, Paul Christiaan Hinnen, Christian Marinus Leewis, Henk-Jan H. Smilde, Baukje Wisse
Publikováno v:
SPIE Proceedings.
The continuing trend of shrinking dimension and the related specifications requires tightening of control loops. To support the tighter control loops, the metrology sampling plans will require increasing sampling density and frequency. This study sho
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::543633219245caa6e295387c0d4b60ad
https://doi.org/10.1117/12.2085957
https://doi.org/10.1117/12.2085957
Autor:
Ewould van West, Jin-Soo Kim, Won-Kwang Ma, Myoung-Soo Kim, Kyu-Tae Sun, Peter Nikolsky, Maryana Escalante Marun, Won-Taik Kwon, Greet Storms, Sungki Park, Marian Otter, Young-Sik Kim, Roy Anunciado
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXVIII.
In this paper we describe the joint development and optimization of the critical dimension uniformity (CDU) at an advanced 300 mm ArFi semiconductor facility of SK Hynix in the high volume device. As the ITRS CDU specification shrinks, semiconductor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1ae567d0bc5d284d39dc4280a2594586
https://doi.org/10.1117/12.2057390
https://doi.org/10.1117/12.2057390
Autor:
Chan-Ho Ryu, Hans Van Der Laan, Peter Ten Berge, Noelle Wright, Chang Moon Lim, Maryana Escalante Marun, Myoung-Soo Kim, Hugo Augustinus Joseph Cramer, Jongsu Lee, Birgitt Hepp, Hyosang Kang, Liesbeth Reijnen
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXVI.
Improving Critical Dimension Uniformity (CDU) for spacer double patterning features is a high priority for double patterning technology. In spacer double patterning the gaps between the spacers are established through various processes (litho, etch,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1ef1f7c5bd4e09f02957fafdd3715d77
https://doi.org/10.1117/12.917824
https://doi.org/10.1117/12.917824
Autor:
Maryana Escalante Marun
In this research we used diverse nanofabrication techniques in order to direct the assembly on micro- and nanostructured surfaces of purified units from the photosynthetic unit of purple bacteria. This allowed us to explore the unique energy transfer
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d4fd12515d8e9b8f7d3a35c015e49b44
https://doi.org/10.3990/1.9789036529198
https://doi.org/10.3990/1.9789036529198
Autor:
Ik-Hyun Jeong, Seung-Woo Koo, Hyun-Sok Kim, Jae-Wuk Ju, Young-Sik Kim, Yong-Tae Cho, Heung-Joo Kim, Viatkina, Katja, van Hemert, Tom, de Wit, Ruud, Deckers, David, Chen, Owen, Nang-Lyeom Oh, Musselman, Marcus, Carbery, Marcus, Ssuwei Chen, Schmidt, Lucian, Heidi Kwon, Jae Gyoo Lee
Publikováno v:
Proceedings of SPIE; 2/16/2019, Vol. 10984, p1-7, 7p
Autor:
Hinnen, Paul, Wang, Vivien, Mardanpour, Hossein, Rottenkolber, Erica, Leewis, Christian, Brunner, Timothy A., Wong, Cheuk W., Rawat, Pawan
Publikováno v:
ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference; 2013, p352-359, 8p
Autor:
Truckenmüller, Roman, Giselbrecht, Stefan, Escalante-Marun, Maryana, Groenendijk, Max, Papenburg, Bernke, Rivron, Nicolas, Unadkat, Hemant, Saile, Volker, Subramaniam, Vinod, Berg, Albert, Blitterswijk, Clemens, Wessling, Matthias, Boer, Jan, Stamatialis, Dimitrios
Publikováno v:
Biomedical Microdevices; Feb2012, Vol. 14 Issue 1, p95-107, 13p
Publikováno v:
Journal of Micro/Nanolithography, MEMS & MOEMS; Oct-Dec2011, Vol. 10 Issue 4, p23-32, 10p