Zobrazeno 1 - 10
of 34
pro vyhledávání: '"Martti Blomberg"'
Autor:
Roberts Trops, Antti Näsilä, Christer Holmlund, Hans Toivanen, Rami Mannila, Ingmar Stuns, Endija Briede, Kai Viherkanto, Martti Blomberg, Heikki Saari
Publikováno v:
Trops, R, Näsila, A, Holmlund, C, Toivanen, H, Mannila, R, Stuns, I, Briede, E, Viherkanto, K, Blomberg, M & Saari, H 2022, Performance of MOEMS FPI based cubic-inch hyperspectral camera . in H Zappe, W Piyawattanametha, W Piyawattanametha & Y-H Park (eds), MOEMS and Miniaturized Systems XXI ., 1201302, International Society for Optics and Photonics SPIE, Proceedings of SPIE-The International Society for Optical Engineering, vol. 12013, MOEMS and Miniaturized Systems XXI 2022, Virtual, Online, 20/02/22 . https://doi.org/10.1117/12.2609426
The MOEMS Fabry-Perot interferometer (MFPI) based hyperspectral cameras have the advantage of being low-cost and highly compact, but the performance characteristics determine if particular device can be used in given application. This paper describes
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8edec1fd37aa48113b5f032654150a79
https://doi.org/10.1117/12.2609426
https://doi.org/10.1117/12.2609426
Autor:
Rami Mannila, Christer Holmlund, Heikki Saari, Ingmar Stuns, Kai Viherkanto, Roberts Trops, Bin Guo, Kari Rainio, Martti Blomberg, Endija Briede, Antti Näsilä, Anna Rissanen
Publikováno v:
Näsilä, A, Holmlund, C, Briede, E, Mannila, R, Trops, R, Blomberg, M, Stuns, I, Guo, B, Viherkanto, K, Rainio, K, Saari, H & Rissanen, A 2019, Cubic-inch MOEMS spectral imager . in W Piyawattanametha, Y-H Park & H Zappe (eds), MOEMS and Miniaturized Systems XVIII ., 109310F, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 10931, MOEMS and Miniaturized Systems XVIII 2019, San Francisco, California, United States, 2/02/19 . https://doi.org/10.1117/12.2508420
Recently developed tunable MEMS Fabry- Perot interferometers based on Ag thin-film mirrors[1] have enabled building highly miniaturized spectral imagers covering almost the complete VNIR wavelength range. The level of miniaturization required by mode
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9f60315f73c210d6361aff88b1789aae
https://cris.vtt.fi/en/publications/2e22fcfe-943f-46af-a99c-cdbf6d594ebf
https://cris.vtt.fi/en/publications/2e22fcfe-943f-46af-a99c-cdbf6d594ebf
Publikováno v:
Rissanen, A, Kantojärvi, U, Blomberg, M, Antila, J & Eränen, S 2012, ' Monolithically integrated microspectrometer-on-chip based on tunable visible light MEMS FPI ', Sensors and Actuators A: Physical, vol. 182, pp. 130-135 . https://doi.org/10.1016/j.sna.2012.05.023
We present a novel microspectrometer-on-chip for the visible spectral region, consisting of a tunable MEMS Fabry-Perot interferometer (FPI) monolithically integrated on a PIN photodiode using IC compatible microfabrication techniques. MEMS FPI is an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::16270c93d7117b3c516433b2bdd752dd
https://doi.org/10.1016/j.sna.2012.05.023
https://doi.org/10.1016/j.sna.2012.05.023
Publikováno v:
Blomberg, M, Kattelus, H & Miranto, A 2010, ' Electrically tunable surface micromachined Fabry-Perot interferometer for visible light ', Sensors and Actuators A: Physical, vol. 162, no. 2, pp. 184-188 . https://doi.org/10.1016/j.sna.2010.01.037
We present a new kind of electrostatically tunable surface micromachined Fabry–Perot interferometer (FPI) structure and a process flow which was successfully used to fabricate devices for visible wavelength range. The novel fabrication process is b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f051e942d39c06e9556accd98561370d
https://doi.org/10.1016/j.proche.2009.07.138
https://doi.org/10.1016/j.proche.2009.07.138
Publikováno v:
Kattelus, H, Ylönen, M & Blomberg, M 2005, ' Amorphous Mo-N and Mo-Si-N films in microelectromechanical systems ', Fatigue & Fracture of Engineering Materials & Structures, vol. 28, no. 8, pp. 743-749 . https://doi.org/10.1111/j.1460-2695.2005.00887.x
Micromachining based on metallic structural material possesses several inherent advantages. Metallic thin films can be deposited at room temperature by various means. In microelectromechanical systems they can thus be fabricated on top of polymeric s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::07477efb664c40dcb2fa07f652763643
https://doi.org/10.1111/j.1460-2695.2005.00887.x
https://doi.org/10.1111/j.1460-2695.2005.00887.x
Publikováno v:
Rusanen, O, Keränen, K, Blomberg, M & Lehto, A 1997, ' Adhesive flip chip bonding in a miniaturzed spectrometer ', Journal of Electronics Manufacturing, vol. 7, no. 4, pp. 239-243 . https://doi.org/10.1142/S0960313197000245
This paper discusses the selection of a suitable isotropically-conductive adhesive for flip chip bonding of a micro-machined component. The adhesive must have adequate electrical conductivity and mechnical bonding strength. Most commercial adhesives
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::228a46ef6d7554cb2039426e865895f1
https://doi.org/10.1142/s0960313197000245
https://doi.org/10.1142/s0960313197000245
Publikováno v:
2013 IEEE SENSORS.
We designed and demonstrated a surface micro-machined tunable Fabry-Perot interferometer for the thermal infrared wavelengths 7.6 μm
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d95bab1ce0f608dcd1f92ff1e97035d6
https://doi.org/10.1109/icsens.2013.6688168
https://doi.org/10.1109/icsens.2013.6688168
Publikováno v:
Tuohiniemi, M, Blomberg, M & Gao, F 2013, ' Infrared spectroscopy study of a poly-silicon film for optimizing the boron-implanting dose ', Journal of Microelectromechanical Systems, vol. 22, no. 5, pp. 1207-1212 . https://doi.org/10.1109/JMEMS.2013.2262580
An experiment was carried out for recording the infrared transmission between 3 and 16 μm for a free-standing poly-silicon (Si) thin film as a function of the boron-ion implanting. The optical constants were extracted in order to optimize the postde
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e5d4e1a11260cd5a9491e0944a8c4160
https://cris.vtt.fi/en/publications/6aef553b-d527-4f20-9546-34829dad95b7
https://cris.vtt.fi/en/publications/6aef553b-d527-4f20-9546-34829dad95b7
Publikováno v:
Tuohiniemi, M, Blomberg, M, Akujärvi, A, Antila, J & Saari, H 2012, ' Optical transmission performance of a surface-micromachined Fabry-Pérot interferometer for thermal infrared ', Journal of Micromechanics and Microengineering, vol. 22, no. 11, 115004 . https://doi.org/10.1088/0960-1317/22/11/115004
We developed a surface-micromachined tunable Fabry–Pérot interferometer for the thermal infrared spectral range of wavelengths 7–12 µm. In this paper, we present the device performance in terms of the optical transmission and the tunability. Th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c6b2231b2a158048e6510ac74bceca9b
https://cris.vtt.fi/en/publications/76b33df7-9b49-4daa-989b-bfe37fd8a962
https://cris.vtt.fi/en/publications/76b33df7-9b49-4daa-989b-bfe37fd8a962
Publikováno v:
Rissanen, A, Akujärvi, A, Antila, J, Blomberg, M & Saari, H 2012, ' MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers ', Journal of Micro/ Nanolithography, MEMS, and MOEMS, vol. 11, no. 2, 023003 . https://doi.org/10.1117/1.JMM.11.2.023003
New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::eb0d1d3136d8be4dca1d8b5d5b030e7c
https://cris.vtt.fi/en/publications/fe3b5e82-5549-4297-b1a9-d1815d4c56d2
https://cris.vtt.fi/en/publications/fe3b5e82-5549-4297-b1a9-d1815d4c56d2