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pro vyhledávání: '"Martin Wedd"'
Autor:
Alan Hydes, Andrew Grantham, Raj Sethi, Tracey Bland, Paul B. Kirby, Caroline Vizard, Anil Patel, Robert V. Wright, Martin Wedd, Melody Branfield, Paul Dennis, Pam Whitaker
Publikováno v:
Integrated Ferroelectrics. 17:205-212
The desired electrical properties of decoupling capacitors for use in an existing MCM-D process have been defined. Two types of dielectric have been investigated, sol-gel deposited P(L)ZT and dual ion beam sputtered (DIBS) BST. Their electrical prope