Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Martin O'Toole"'
Autor:
Ankit Pokhrel, Giulio Marti, Martin O'Toole, Gayle Murdoch, Anshul Gupta, Stefan Decoster, Souvik Kundu, Elisabeth Camerotto, Quoc Toan Le, Arame Thiam, Alicja Lesniewska, Seongho Park, Zsolt Tokei
Publikováno v:
2022 IEEE International Interconnect Technology Conference (IITC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9580d0725e6a6464180f74528f5313d2
https://doi.org/10.1109/iitc52079.2022.9881278
https://doi.org/10.1109/iitc52079.2022.9881278
Autor:
Stefan Decoster, Souvik Kundu, Frédéric Lazzarino, Stéphane Larivière, Martin O'Toole, Gayle Murdoch, Quoc Toan Le, Marleen van der Veen, Nancy Heylen
Publikováno v:
Advanced Etch Technology and Process Integration for Nanopatterning XI.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::60a4b7663806976d8916146301b25d1f
https://doi.org/10.1117/12.2614267
https://doi.org/10.1117/12.2614267
Autor:
Martin O'Toole, Louis J. Lanzerotti, Atsushi Ogino, Terry A. Spooner, Sean Reidy, Craig Child, James Hsueh-Chung Chen, Lawrence A. Clevenger
Publikováno v:
2018 IEEE International Interconnect Technology Conference (IITC).
SADP are one of the important patterning techniques for all the FEOL/BEOL levels in 7 nm technology node and beyond. In BEOL, not only the minimum features, but wide lines are also important for power distribution even in the thin wire levels. Howeve
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6e85de8449b179e3133293eb5c291861
https://doi.org/10.1109/iitc.2018.8430439
https://doi.org/10.1109/iitc.2018.8430439
Autor:
James Hsueh-Chung Chen, Terry A. Spooner, Martin O'Toole, Jason Eugene Stephens, Shreesh Narasimha, Ben Kim, Licausi Nicholas, Craig Child
Publikováno v:
2017 IEEE International Interconnect Technology Conference (IITC).
In this paper, a strategy of performing segment removal in an SAQP (self-aligned quadruple patterning) and its implication on interconnect parasitic capacitance are reported. In order to reduce the cost and process complexity, through process emulati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fb214faa90ea884f4e0d999979442ac2
https://doi.org/10.1109/iitc-amc.2017.7968943
https://doi.org/10.1109/iitc-amc.2017.7968943
Autor:
Martin O'Toole, James Hsueh-Chung Chen, Shreesh Narasimha, Jason Eugene Stephens, Shao Beng Law, Genevieve Beique, Ben Kim, Craig Child, E. Todd Ryan, Steven Leibiger, Louis J. Lanzerotti, Terry A. Spooner
Publikováno v:
2017 IEEE International Interconnect Technology Conference (IITC).
In this paper, the impact of gap-fill planarity on Multi-Self-Aligned Block, SADP (self-aligned double patterning) process for advanced optical technology nodes (7 nm/5 nm) interconnects was studied through process emulations. This study specifically
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4672fecbe6df4af021d44ffb253152cc
https://doi.org/10.1109/iitc-amc.2017.7968964
https://doi.org/10.1109/iitc-amc.2017.7968964
Autor:
Sywert Brongersma, Martin O'Toole, Karen Maex, Dominiek Degryse, Bart Vandevelde, Youssef Travaly, Francesca Iacopi
Publikováno v:
Microelectronic Engineering. 75:54-62
Severe mechanical loads during multilevel metallization manufacturing, such as repeated thermal cycles and chemical-mechanical planarization processes, can induce high stresses in interconnect structures. It is shown that such stresses in ultra-low-k
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bb0b09bdbc7034d594fb2af280557249
https://doi.org/10.1016/j.mee.2003.09.011
https://doi.org/10.1016/j.mee.2003.09.011
Autor:
Jianting, Wang, Martin, O'Toole, Archna, Massey, Souvik, Biswas, Michael, Nantz, Samuel, Achilefu, Kyung A, Kang
Publikováno v:
Advances in experimental medicine and biology. 701
Nanoparticles are currently being intensively studied for in vivo molecular imaging because of their unique and beneficial properties. Among these particles, some metal particles possess strong surface plasmon fields that can effectively alter fluore
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::074d08507e95f4faedfb860c069d16a0
https://pubmed.ncbi.nlm.nih.gov/21445782
https://pubmed.ncbi.nlm.nih.gov/21445782
Publikováno v:
Plastic and Reconstructive Surgery. 121:355-356
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5fdc358742fa7f73e0fbb849df125b75
https://doi.org/10.1097/01.prs.0000300343.34993.40
https://doi.org/10.1097/01.prs.0000300343.34993.40
Autor:
John J. Boland, Martin O'Toole
Publikováno v:
Applied Physics Letters. 93:263107
Here we report on a technique for anisotropic etching of silicon similar to the well established vapor-liquid-solid technique for the growth of semiconductor nanowires. By annealing a patterned gold line on a H terminated silicon surface, Si atoms di
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::01a7276686173bb196f3131a074dccdf
https://doi.org/10.1063/1.3055606
https://doi.org/10.1063/1.3055606
Autor:
Decôme M; Department of Clinical Sciences (Decôme, Martin, O'Toole) and Department of Pathology and Microbiology (Bau-Gaudreault), Université de Montréal Faculté de médecine vétérinaire, 1500 rue des Vétérinaires, Saint Hyacinthe, Quebec J2S 7C6., Martin E; Department of Clinical Sciences (Decôme, Martin, O'Toole) and Department of Pathology and Microbiology (Bau-Gaudreault), Université de Montréal Faculté de médecine vétérinaire, 1500 rue des Vétérinaires, Saint Hyacinthe, Quebec J2S 7C6., Bau-Gaudreault L; Department of Clinical Sciences (Decôme, Martin, O'Toole) and Department of Pathology and Microbiology (Bau-Gaudreault), Université de Montréal Faculté de médecine vétérinaire, 1500 rue des Vétérinaires, Saint Hyacinthe, Quebec J2S 7C6., O'Toole E; Department of Clinical Sciences (Decôme, Martin, O'Toole) and Department of Pathology and Microbiology (Bau-Gaudreault), Université de Montréal Faculté de médecine vétérinaire, 1500 rue des Vétérinaires, Saint Hyacinthe, Quebec J2S 7C6.
Publikováno v:
The Canadian veterinary journal = La revue veterinaire canadienne [Can Vet J] 2019 Nov; Vol. 60 (11), pp. 1177-1181.