Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Martin Hanicinec"'
Publikováno v:
Atoms, Vol 9, Iss 4, p 85 (2021)
Gathering data on electron collisions in plasmas is a vital part of conducting plasma simulations. However, data on neutral radicals and neutrals formed in the plasma by reactions between different radicals are usually not readily available. While th
Externí odkaz:
https://doaj.org/article/d84f5faee3ca42b8a5e582b26d31cb2f
Autor:
Bridgette Cooper, Maria Tudorovskaya, Sebastian Mohr, Aran O’Hare, Martin Hanicinec, Anna Dzarasova, Jimena D. Gorfinkiel, Jakub Benda, Zdeněk Mašín, Ahmed F. Al-Refaie, Peter J. Knowles, Jonathan Tennyson
Publikováno v:
Atoms, Vol 7, Iss 4, p 97 (2019)
Collisions of low energy electrons with molecules are important for understanding many aspects of the environment and technologies. Understanding the processes that occur in these types of collisions can give insights into plasma etching processes, e
Externí odkaz:
https://doaj.org/article/42c86f5aaf764f35a526c838207439b6
Publikováno v:
Journal of Physics D: Applied Physics.
Machine learning (ML) is used to provide reactions rates appropriate for models of low temperature plasmas with a focus on A + B $\rightarrow$ C + D binary chemical reactions. The regression model is trained on data extracted from the QBD, KIDA, NFRI
Autor:
Janet Hopkins, Taku Umemoto, Takuo Nishida, Martin Hanicinec, Oliver Ansell, Lijie Li, Harry Fulton
Publikováno v:
IEEE Transactions on Components, Packaging and Manufacturing Technology. 10:694-703
The main objective of this article is to establish which of the many dicing tapes used in the semiconductor industry would be most suitable for use in plasma dicing. Tape design over the past 40 years has continually evolved through advancements in b
Publikováno v:
Atoms, Vol 9, Iss 85, p 85 (2021)
Atoms
Volume 9
Issue 4
Atoms
Volume 9
Issue 4
Gathering data on electron collisions in plasmas is a vital part of conducting plasma simulations. However, data on neutral radicals and neutrals formed in the plasma by reactions between different radicals are usually not readily available. While th
Autor:
Anna Dzarasova, Zdenek Masin, Martin Hanicinec, B. D. Cooper, Jimena D. Gorfinkiel, Jakub Benda, Ahmed Al-Refaie, Maria Tudorovskaya, Peter J. Knowles, Jonathan Tennyson, Aran O'Hare, Sebastian Mohr
Publikováno v:
Atoms
Volume 7
Issue 4
Atoms, Vol 7, Iss 4, p 97 (2019)
Volume 7
Issue 4
Atoms, Vol 7, Iss 4, p 97 (2019)
Collisions of low energy electrons with molecules are important for understanding many aspects of the environment and technologies. Understanding the processes that occur in these types of collisions can give insights into plasma etching processes, e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b959c92adfb3184e53fb0d83882438dd
https://doi.org/10.20944/preprints201907.0126.v1
https://doi.org/10.20944/preprints201907.0126.v1
Publikováno v:
Atoms, Vol 12, Iss 4, p 20 (2024)
The Atomic and Molecular Data Unit of the International Atomic Energy Agency has developed a new database, CollisionDB, to provide an open, free, robust and long-term repository of data on plasma collisional processes. The database contains data on c
Externí odkaz:
https://doaj.org/article/76fe76f7b36a40feaa559abc686b7d22
Publikováno v:
Plasma Science and Technology. 21:064006
Typical feed gas mixtures used in technological and other plasmas may give rise to reaction networks involving several hundred reactions. Such chemistries are often too large to be used in full reactor simulations and it is therefore desirable to con
Publikováno v:
Plasma Science & Technology; Jun2019, Vol. 21 Issue 6, p1-1, 1p