Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Martin Frerichs"'
Autor:
Silke Behrens, Helmut Boennemann, Nina Matoussevitch, Eckhard Dinjus, Hartwig Modrow, Natalie Palina, Martin Frerichs, Volker Kempter, Wolfgang Maus-Friedrichs, Andre Heinemann, et al. et al.
Publikováno v:
ChemInform. 37
Autor:
Martin Frerichs
Publikováno v:
ASP-DAC
Manufacturing induced optimizations in the mask preparation step by layout post processing and fabrication inherent imperfections, like trapezoidal interconnect cross sections or variations of the dielectric interlayer thickness, lead to increased mi