Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Marti, F. J."'
Publikováno v:
Boletín de la Sociedad Española de Cerámica y Vidrio, Vol 37, Iss 6, Pp 447-453 (1998)
The fundamentals of the Chemical Vapour Deposition (CVD) techniques and the key parameters determining the characteristics of the deposited layers are described. In addition, we discuss the different activation methods of the precursor gases which ar
Externí odkaz:
https://doaj.org/article/ef4ef6eef48944aeb2ea6f2c1e4d16a6
Publikováno v:
Boletín de la Sociedad Española de Cerámica y Vidrio, Vol 42, Iss 1, Pp 27-31 (2003)
Chemical vapour deposition (CVD) has been successfully used for the synthesis of a large variety of compounds. Initially the technique was developed for microelectronic applications and then was widespread used for the preparation of hard coatings, o
Externí odkaz:
https://doaj.org/article/3af88127b53d464a8d620102ed12d1a1