Inert-Atmosphere Microfabrication Technology for 2D Materials and Heterostructures.

Autor: Duleba A; P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia., Pugachev M; P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia., Blumenau M; P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia., Martanov S; P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia., Naumov M; Dukhov Research Institute of Automatics (VNIIA), Moscow 127055, Russia., Shupletsov A; P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia., Kuntsevich A; P.N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow 119991, Russia.

Publikováno v: Micromachines [Micromachines (Basel)] 2023 Dec 31; Vol. 15 (1). Date of Electronic Publication: 2023 Dec 31.