Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Markus Luenenbuerger"'
Autor:
Michael Heuken, Markus Luenenbuerger, Maarten Leys, Adam R. Boyd, Stefan Degroote, Johannes Kaeppeler, Olaf Rockenfeller, Frank Schulte, Marianne Germain
Publikováno v:
physica status solidi c. 6
An AlGaN based high electron mobility transistor (HEMT) structure was grown on 200 mm diameter (111) silicon by metal organic chemical vapour deposition (MOCVD). The growth was initiated by an AlN layer directly on Si. A level wafer temperature profi
Autor:
J. F. Woitok, Y. Dikme, Michael Heuken, A. V. Danilchyk, Markus Luenenbuerger, V. N. Pavlovskii, Holger Kalisch, A. L. Gurskii, Rolf H. Jansen, E. V. Lutsenko, G. P. Yablonskii, Bernd Schineller, Vitaly Z. Zubialevich
Publikováno v:
Physics, Chemistry and Application of Nanostructures.
Autor:
Thomas Walther, I.P. Marko, Vitalii Z. Zubialevich, A. L. Gurskii, Markus Luenenbuerger, Harry Protzmann, Holger Kalisch, Evgenii V. Lutsenko, G. P. Yablonskii, Michael Heuken, Bernd Schineller, V. N. Pavlovskii, O. Schoen
Publikováno v:
SPIE Proceedings.
ZnSe/ZnMgSSe and InGaN/GaN heterostructure based lasers under optical transverse pumping by pulsed N 2 -laser radiation were investigated in a wide spectral, temperature and excitation intensity range for various types of heterostructures which diffe
Autor:
Bernd Schoettker, Harry Protzmann, Markus Luenenbuerger, Bernd Wachtendorf, Michael Heuken, O. Schoen
Publikováno v:
SPIE Proceedings.
The growth conditions for GaN/GaInN MQW structures have been studied in detail on AIX 2000 HT G3 Planetary Reactors. Major process variables, such as precursor supply, growth time and growth temperature have been varied. To describe the dependencies
Autor:
Y. Dikme, Georg Gerstenbrandt, Markus Luenenbuerger, Holger Kalisch, O. Schoen, Harry Protzmann, Rolf H. Jansen, Michael Heuken, A. Alam
Publikováno v:
SPIE Proceedings.
In this letter a number of latest results from the process development on AIXTRON production scale MOVPE reactors will be reported. Growth of GaN on alternative substrates has been examined. Up to 900 nm crack free GaN layer were deposited on Si usin
Autor:
Markus Luenenbuerger, Bernd Schineller, G. P. Yablonskii, Vitalii Z. Zubialevich, I.P. Marko, Michael Heuken, A. L. Gurskii, A. Alam, Lutsenko Evgenii Viktorovich, Harry Protzmann, V. N. Pavlovskii
Publikováno v:
SPIE Proceedings.
The influence of layer thickness, heterostructure design, optical confinement factor and spontaneous emission efficiency on laser parameters of GaN based quantum well optically pumped lasers is studied in wide spectral (373 - 470 nm), temperature (77
Autor:
Harry Protzmann, Alois Krost, Armin Dadgar, Michael D. Bremser, Bernd Schineller, Egbert Woelk, Markus Luenenbuerger, Michael Heuken, A. Alam
Publikováno v:
SPIE Proceedings.
We report results on the transferability of a blue-green electroluminescence test structure (ELT) process across different reactor geometries and substrate materials. The process was transferred from the conditions of our well-known 6 X 2 inch to the
Autor:
E. V. Lutsenko, Markus Luenenbuerger, Michael Heuken, G. P. Yablonskii, Bernd Schineller, H. Protzmann
Publikováno v:
Physics, Chemistry and Application of Nanostructures.
Autor:
E. V. Lutsenko, I.P. Marko, Michael Heuken, B. Schtneller, A. V. Mudryi, Harry Protzmann, Markus Luenenbuerger, Vitaly Z. Zubialevich, V. N. Pavlovskii, G. P. Yablonskii
Publikováno v:
Physics, Chemistry and Application of Nanostructures.
Publikováno v:
SPIE Proceedings.
Normal incidence reflectivity measurements were carried out in an AIX 2000G3HT Multiwafer Planetary ReactorR MOVPE system, a large scale production tool for GaN-based devices, and in the single wafer AIX 200 RF system. In situ monitoring was used to