Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Markus Koob"'
Publikováno v:
MRS Proceedings. 664
We investigate a-SiC:H p-layer deposition for a-Si:H-based solar cells by Hot-Wire CVD using alternatively methane, ethane, and acetylene. Carbon incorporation in the film results from gas-phase reactions and not from direct dissociation at the hot f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c1df73e424af7f3cc6d4f2f7ed0c4489
https://doi.org/10.1557/proc-664-a3.6
https://doi.org/10.1557/proc-664-a3.6
