Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Mark Maslow"'
Autor:
Joern-Holger Franke, Andreas Frommhold, Arnaud Dauendorffer, Kathleen Nafus, Gijsbert Rispens, Mark Maslow
Publikováno v:
Journal of Micro/Nanopatterning, Materials, and Metrology. 21
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c134e93d9443aa62eb5fd3bae3db25ca
https://doi.org/10.1117/1.jmm.21.2.023201
https://doi.org/10.1117/1.jmm.21.2.023201
Autor:
Filip Schleicher, Joost Bekaert, Arame Thiam, Stefan Decoster, Romuald Blanc, Frédéric Lazzarino, Jara Garcia-Santaclara, Gijsbert Rispens, Mark Maslow
Publikováno v:
Advanced Etch Technology and Process Integration for Nanopatterning XI.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a7da1ddd90e82ad8b75c160020aba246
https://doi.org/10.1117/12.2610941
https://doi.org/10.1117/12.2610941