Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Mark J. Maslow"'
Publikováno v:
Optical and EUV Nanolithography XXXVI.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::261be512f2e6e2564b9b1f97c9d7f9de
https://doi.org/10.1117/12.2658306
https://doi.org/10.1117/12.2658306
Autor:
John S. Petersen, Will Conley, Bernard J. Roman, Lloyd C. Litt, Kevin Lucas, Wei Wu, Douglas J. Van Den Broeke, J. Fung Chen, Thomas L. Laidig, Kurt E. Wampler, David J. Gerold, Mark J. Maslow, Robert J. Socha, Judith van Praagh, Richard Droste
Publikováno v:
SPIE Proceedings.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::02aca9b47cc2b461c77b71e3a0f04437
https://doi.org/10.1117/12.475692
https://doi.org/10.1117/12.475692
Autor:
Maslow, Mark John, Timoshkov, Vadim, Kiers, Ton, Tae Kwon Jee, Reijnen, Liesbeth, Kumar, Kaushik, Demand, Marc, Fonseca, Carlos, Cerbu, Florin, Schelcher, Guillaume, Beral, Christophe
Publikováno v:
Proceedings of SPIE; 1/15/2018, Vol. 10587, p1-14, 14p
Autor:
Li, Yanqiu, Huang, Guosheng
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 6, p2679-2683, 5p