Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Mark I. Wagner"'
Autor:
Charles A. Jones, Stephen M. Gross, James P. DeYoung, Joseph M. DeSimone, D. Yang, Eugene A. Irene, Mark I. Wagner
Publikováno v:
Chemistry of Materials. 15:2867-2869
A “dry” supercritical CO2-based etchant solution containing HF/pyridine as an anhydrous HF source effectively dissolves SiO2 thin films on silicon wafers. These dilute etchant solutions are active in removal of post-etch residues in back-end-of-l
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6e211d265cc73d6258109fae7be2af60
https://doi.org/10.1021/cm034235w
https://doi.org/10.1021/cm034235w
Publikováno v:
Langmuir : the ACS journal of surfaces and colloids. 25(11)
The mechanism of developing an extreme ultraviolet (EUV) commercial photoresist with supercritical carbon dioxide (scCO2) and a CO2 compatible salt (CCS) solution was studied. The cloud point of CCS in CO2 and the pressure at which the photoresist di
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::069a441589dacbe1b872b8396d8fabfb
https://pubmed.ncbi.nlm.nih.gov/19466780
https://pubmed.ncbi.nlm.nih.gov/19466780
Publikováno v:
SPIE Proceedings.
New lithographic techniques are being implemented to help further reduce feature sizes in microelectronics. A technique for the development of standard extreme ultraviolet (EUV) photoresists in a carbon dioxide compatible salt (CCS) and supercritical
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::376dd0982788612767c6fe1678b81ca9
https://doi.org/10.1117/12.712093
https://doi.org/10.1117/12.712093
Autor:
Evangelos Gogolides, Chris Harbinson, James P. DeYoung, George P. Patsis, Vassilios Constantoudis, Mark I. Wagner
Publikováno v:
SPIE Proceedings.
Line Width Roughness (LWR) of resists constitutes one of the main obstacles in the race of further shrinking the feature dimensions of fabricated devices. Thus, the reduction and control of LWR is one of the biggest challenges of next generation lith
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::508c635192b4881d21689b40a807c00e
https://doi.org/10.1117/12.656579
https://doi.org/10.1117/12.656579
Autor:
Barbara Milani, Maurice Brookhart, James C. Barborak, Mark I. Wagner, Francis C. Rix, Michael J. Rachita
Publikováno v:
Dalton Transactions. :8977
A mechanistic interpretation of the [(1,10-phenanthroline)Pd(CH(3))(CH(3)CN)](+)[BArF](-) (1a) and [(2,2'-bipyridine)Pd(CH(3))(CH(3)CN)](+)[BArF](-) (1b) (BArF = 3,5-(CF(3))(2)-C(6)H(3)) catalyzed perfectly alternating copolymerization of styrenes wi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::aaf6dfdb7929cabbca96c776f8a78f52
https://doi.org/10.1039/b911392d
https://doi.org/10.1039/b911392d
Autor:
Mark I. Wagner, Maurice Brookhart
Publikováno v:
Journal of the American Chemical Society. 118:7219-7220
We report a new strategy for synthesis of stereoblock polymers involving ancillary ligand exchange during a living transition-metal-catalyzed polymerization. We have also demonstrated cooperativity between chain-end and site control mechanisms throug
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::679f2734a68299e079343f8189671f59
https://doi.org/10.1021/ja9610141
https://doi.org/10.1021/ja9610141
Publikováno v:
Journal of the American Chemical Society. 116:3641-3642
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::31fed53c18d16a35fcb397dcfab550fe
https://doi.org/10.1021/ja00087a077
https://doi.org/10.1021/ja00087a077
Autor:
Francis C. Rix, Michael J. Rachita, Mark I. Wagner, Maurice Brookhart, Barbara Milani, James C. Barborak
Publikováno v:
Dalton Transactions: An International Journal of Inorganic Chemistry; Oct2009, Vol. 2009 Issue 41, p8977-8992, 16p
Autor:
Maurice Brookhart, S. Tahliani, Mark I. Wagner, Delwin L. Elder, Joseph M. DeSimone, Francis C. Rix, J. Barborak
Publikováno v:
Macromolecular Symposia. 98:219-219
Well defined Pd(II) catalysts of the type (N′N)Pd(CH3)(Solv.)+ B(Arf)4- (Arf = −3, 5-(CF3)2C6H3) have been prepared for living alternating copolymerizations of olefins with CO. This talk will focus on the mechanistic details of chain growth as el
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6a26c1e9aba74646c3a1466373696169
https://doi.org/10.1002/masy.19950980118
https://doi.org/10.1002/masy.19950980118