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Autor:
Pinal Patel, Ramakrishna Vetury, Rohan Holden, Michael A. McLain, Shawn R. Gibb, Mark D. Boomgarden, Brook Hosse, Jeffrey B. Shealy, Alexander Y. Feldman, Michael P. Lewis, Michael D. Hodge
Publikováno v:
2017 IEEE MTT-S International Microwave Symposium (IMS).
Bulk acoustic wave (BAW) filters operating at center frequency of 3.7GHz, comprising of BAW resonators utilizing single crystal aluminum nitride (AlN) piezoelectric films epitaxially grown on silicon carbide (SiC) substrates, are reported. Metal-orga