Study of Gallium-Doped Zinc Oxide Thin Films Processed by Atomic Layer Deposition and RF Magnetron Sputtering for Transparent Antenna Applications.

Autor: Lunca-Popa P; Materials Research and Technology Department (MRT), Luxembourg Institute of Science and Technology (LIST), 41 rue de Brill, L-4422 Belvaux, Luxembourg., Chemin JB; Materials Research and Technology Department (MRT), Luxembourg Institute of Science and Technology (LIST), 41 rue de Brill, L-4422 Belvaux, Luxembourg., Adjeroud N; Materials Research and Technology Department (MRT), Luxembourg Institute of Science and Technology (LIST), 41 rue de Brill, L-4422 Belvaux, Luxembourg., Kovacova V; Materials Research and Technology Department (MRT), Luxembourg Institute of Science and Technology (LIST), 41 rue de Brill, L-4422 Belvaux, Luxembourg., Glinsek S; Materials Research and Technology Department (MRT), Luxembourg Institute of Science and Technology (LIST), 41 rue de Brill, L-4422 Belvaux, Luxembourg., Valle N; Materials Research and Technology Department (MRT), Luxembourg Institute of Science and Technology (LIST), 41 rue de Brill, L-4422 Belvaux, Luxembourg., El Hachemi M; Materials Research and Technology Department (MRT), Luxembourg Institute of Science and Technology (LIST), 41 rue de Brill, L-4422 Belvaux, Luxembourg., Girod S; Materials Research and Technology Department (MRT), Luxembourg Institute of Science and Technology (LIST), 41 rue de Brill, L-4422 Belvaux, Luxembourg., Bouton O; Materials Research and Technology Department (MRT), Luxembourg Institute of Science and Technology (LIST), 41 rue de Brill, L-4422 Belvaux, Luxembourg., Maris JP; Materials Research and Technology Department (MRT), Luxembourg Institute of Science and Technology (LIST), 41 rue de Brill, L-4422 Belvaux, Luxembourg.

Publikováno v: ACS omega [ACS Omega] 2023 Jan 30; Vol. 8 (6), pp. 5475-5485. Date of Electronic Publication: 2023 Jan 30 (Print Publication: 2023).