Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Mario De-Miguel Ramos"'
A Solidly Mounted Resonator With CMOS-Fabricated Acoustic Mirror For Low-Cost Air Quality Monitoring
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 23/06/2019-27/06/2019 | Berlin, Germany
Archivo Digital UPM
Universidad Politécnica de Madrid
Archivo Digital UPM
Universidad Politécnica de Madrid
This work presents a novel Solidly Mounted Resonator (SMR) device for use in a portable, low-cost and low power air quality monitor. The acoustic mirror, an essential part of the SMR device for energy confinement, is fabricated within a CMOS process,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::84b959d9fbc8c63e282e5fa496d51a56
http://oa.upm.es/65252/
http://oa.upm.es/65252/
Autor:
William I. Milne, Jian R. Lu, Andrew J. Flewitt, Xiubo Zhao, Luis Garcia-Gancedo, X.Y. Du, Enrique Iborra, Yong Qing Fu, Jikui Luo, Mario de Miguel Ramos
Publikováno v:
Journal of Non-Newtonian Fluid Mechanics. 222:209-216
ZnO thin film based surface and bulk acoustic wave devices are reviewed in this paper. The films were initially produced using a standard RF sputtering technique. However in order to produce lower stress, smoother films at low temperatures, a novel H
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9a78468e58cda7317ef62ddd4e1aee8a
https://doi.org/10.1016/j.jnnfm.2014.12.002
https://doi.org/10.1016/j.jnnfm.2014.12.002
Autor:
Andrew J. Flewitt, Xiubo Zhao, Enrique Iborra, Jack K. Luo, Mario de Miguel Ramos, X.Y. Du, Yong Qing Fu, Jian R. Lu, WI Milne, Luis Garcia-Gancedo
Publikováno v:
Journal of Non-Newtonian Fluid Mechanics. 228:96
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::16d916c4de4dfd8183639cf9f83f40b8
https://doi.org/10.1016/j.jnnfm.2015.11.005
https://doi.org/10.1016/j.jnnfm.2015.11.005