Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Marinus Werber"'
Autor:
Christoph Langer, Josef Biba, Andreas Pahlke, Walter Hansch, Marinus Werber, Simon Edler, Felix Düsberg, Andreas Schels, Michael Bachmann
Publikováno v:
2020 33rd International Vacuum Nanoelectronics Conference (IVNC).
A novel silicon field emission source is presented, which is fabricated by saw dicing and TMAH-etching. Samples with different tip densities were investigated. Due to the fabrication process a higher tip density leads to a lower tip height. Very simi
Autor:
Andreas Schels, Andreas Pahlke, Manuel Meyer, Josef Biba, Felix Düsberg, Simon Edler, David von Bergen, Marinus Werber, Walter Hansch, Christoph Langer, Michael Bachmann
Publikováno v:
Journal of Vacuum Science & Technology B. 39:027001
Autor:
Manuel Meyer, David von Bergen, Marinus Werber, Andreas Schels, Felix Düsberg, Simon Edler, Walter Hansch, Andreas Pahlke, Christoph Langer, Josef Biba, Michael Bachmann
Publikováno v:
Journal of Vacuum Science & Technology B. 39:013205
Silicon field emitter arrays (FEAs) with different tip sizes and quantities were fabricated by saw dicing and anisotropic wet chemical etching by tetramethylammonium hydroxide. The tip is formed by the different etching rates of the crystal facets le