Fabrication of Metallic Microstructures by Focused Electron Beam Direct Writing in SEM.

Autor: Genkov, Kaloyan V., Tsutsumanova, Gichka G., Marinov, Simeon M., Russev, Stoyan C.

Publikováno v: AIP Conference Proceedings; 2019, Vol. 2075 Issue 1, p160004-1-160004-6, 6p, 2 Black and White Photographs, 1 Diagram, 2 Charts