Výsledky vyhledávání - "Marinescu, O.E."

Method of designing a projection system, lithographic apparatus and device manufacturing method

Autor: Bociort, F., Van Turnhout, M., Marinescu, O.E.

Publikováno v: US 2007165296 (A1)

Optimization of a projection system is performed to obtain a starting configuration that is at a local minimum of the merit function or simply a previously known minimum system is used as the starting configuration. A zero-thickness meniscus lens is

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Projection system design method, lithography apparatus, and device manufacturing method

Autor: Botsuioruto, F., Van Turnhout, M., Marinescu, O.E.

Publikováno v: JP 2007114750 (A)

PROBLEM TO BE SOLVED: To provide a method of designing a projection system for a lithography projection apparatus, to provide a lithography apparatus comprising the projection system, and to provide a method for manufacturing a device by using the pr

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Novel design methods for high-quality lithographic objectives

Autor: Marinescu, O.E.

Publikováno v: None

This thesis discusses some of the challenges of optical design for Extreme Ultraviolet (EUV) mirror systems and illustrates novel design techniques and their application to, preponderantly, EUV systems and, in addition, some Deep Ultraviolet (DUV) li

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Networks of local minima for extreme ultraviolet lithographic objectives

Autor: Bociort, F., Marinescu, O.E.

Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO

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Networks of local minima for EUV mirror systems

Autor: Marinescu, O.E., Bociort, F., Braat, J.J.M.

Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy and TNO

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Avoiding unstable regions in the design space of EUV mirror systems with high-order aspheric surfaces

Autor: Braat, J.J.M., Marinescu, O.E., Bociort, F.

Poster presentation Optics Research Group TU Delft in cooperation with ASM Lithograpy

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