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pro vyhledávání: '"Marijean Azrak"'
Autor:
Chung Yee Lee, Marijean Azrak
Publikováno v:
Journal of Electronics Manufacturing. :145-157
Semiconductor manufacturing occurs in a highly complex environment where many work areas interact. This paper is motivated by a situation in a test area of semiconductor manufacturing. It concentrates on the operations that occur after the last test
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28bafe0f0376e8e46c3a32f8a05cba0d
https://doi.org/10.1142/s0960313193000164
https://doi.org/10.1142/s0960313193000164
Autor:
Kiwoon Kim, Marijean Azrak, Cesar Garza, Terry A. Breeden, Richard Peters, J. Jiang, Patrick Montgomery
Publikováno v:
SPIE Proceedings.
As semiconductor gate lengths shrink, photoresist trends toward thinner films. Thick photoresist films are not desirable because they tend to absorb more light, require higher energies to pattern, increase pattern collapse, and subtract from depth of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::315c0d39f4bbe098513a4a4075e0e8e6
https://doi.org/10.1117/12.651047
https://doi.org/10.1117/12.651047
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