Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Marie Gorisse"'
Autor:
Catherine Maeder-Pachurka, Ruediger Bauder, Romain Lefebvre, Alexandre Reinhardt, Gail Castellan, Marie Gorisse, Lyvia Dours, Hans-Peter Friedrich, Marie Bousquet, Aurelie Ravix, Hans-Joerg Timme, Pierre Perreau
Publikováno v:
2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC).
Bulk Acoustic Wave Resonators made of lithium niobate thin films obtained by layer transfer techniques relied so far only on full sheet buried electrodes, what is impractical in vue of proper filter implementations. In this work, we introduced patter
Autor:
Thierry Laroche, Eric Butaud, Yann Sinquin, Isabelle Huyet, Alexis Drouin, Emilie Courjon, Marie Bousquet, Alexandre Reinhardt, Sylvain Ballandras, Ionut Radu, Marie Gorisse, Alexandre Clairet, Florent Bernard
Publikováno v:
2018 IEEE International Ultrasonics Symposium (IUS).
This paper investigates advanced piezoelectric-on-insulator (POI) substrates elaborated using the Smart Cut™ technology to transfer a thin, high uniformity, single-crystal LiTaO 3 layer on top of a silicon handle wafer. These POI substrates enable