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Publikováno v:
Superficies y Vacío. 31:33-38
This document presents the finite element modeling using ANSYS to obtain the thermal resistance of a MEMS thermal sensor. Additionally, the document describes a thermoelectrical characterization to find the sensor performance parameters. For modeling
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ea7d0f6389808703a972ab18cc5dce1e
https://doi.org/10.47566/2018_syv31_1-020033
https://doi.org/10.47566/2018_syv31_1-020033
