Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Mariazel Maqueda Lopez"'
Autor:
Mariazel Maqueda Lopez, Emanuele Andrea Casu, Montserrat Fernandez-Bolanos, Adrian Mihai Ionescu
Publikováno v:
Proceedings, Vol 1, Iss 4, p 391 (2017)
This paper reports the design and characterization of partially-filled-gap capacitive MEMS resonators for distributed mass sensing applications. By filling the gap with HfO2, the coupling coefficient between electrode-resonator increases by ×6.67 ti
Externí odkaz:
https://doaj.org/article/0071f1340d854d30bf1ff34359804285
Publikováno v:
Communications Engineering, Vol 3, Iss 1, Pp 1-6 (2024)
With global conflicts on the rise, it is crucial for transdisciplinary researchers to become more actively involved in leveraging technology to promote peace. After years of experience and discussions with multiple stakeholders, we have identified sp
Externí odkaz:
https://doaj.org/article/d945b92b0a8643aebf92cc6ab81a871d
Publikováno v:
Proceedings, Vol 1, Iss 4, p 391 (2017)
This paper reports the design and characterization of partially-filled-gap capacitive MEMS resonators for distributed mass sensing applications. By filling the gap with HfO2, the coupling coefficient between electrode-resonator increases by ×6.67 ti
Publikováno v:
2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC).
This paper reports a 80nm air gap double-ended tuning fork (DETF) resonator partially filled with 20nm of HfO 2 . The device operates at 10.7 MHz with a quality Q-factor of 7930 and a motional resistance, R m , x18 better than for the measured counte
Autor:
Peter Ramm, Ilja Ocket, Adrian M. Ionescu, Amin Enayati, Josef Weber, Armin Klumpp, Mariazel Maqueda Lopez, Wolfgang A. Vitale, Reinhard Merkel, Walter De Raedt, Montserrat Fernandez-Bolanos
Publikováno v:
3DIC
We demonstrate and review the unique fine-pitch high-aspect ratio tungsten-filled through-silicon vias (W-TSVs) technology developed by Fraunhofer EMFT in high-resitivity silicon substrates. The proposed process flow is fully compatible with both CMO
Autor:
Wolfgang A. Vitale, Montserrat Fernandez-Bolanos, Emanuele A. Casu, Mariazel Maqueda Lopez, Adrian M. Ionescu
Publikováno v:
Silicon Nanoelectronics Workshop (SNW) 2016 IEEE
RF channel selection in front end systems enabling Software Defined Cognitive Radios and low power communication requires resonators with high quality factor (Q) and 50O impedance matching [1]. Electromechanical resonators can reach very high Q but s
Publikováno v:
Silicon Nanoelectronics Workshop (SNW) 2016 IEEE
High frequency wine-glass mode bulk MEMS resonators actuated by means of capacitive transduction have been fabricated by using solid-gaps based on polyvinylidenefluoride-trifluoroethylene (PVDF-TrFE). The fabrication process flow of patterned PVDF-Tr
Autor:
Yusuf Leblebici, Mariazel Maqueda Lopez, Vijaya Sankara Rao Pasupureddi, Mahsa Shoaran, Alexandre Schmid
Publikováno v:
ISCAS
High-density wireless intracranial neural recording is a promising technology enabling the autonomous diagnosis and therapy of brain diseases. Increasing the number of recording channels is accompanied by the increased amount of data resulting in an