Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Marek Smolarczyk"'
Autor:
Shujie Liu, Philipp Kästner, Roland Donatiello, Anup Shrivastava, Marek Smolarczyk, Mustaqim Siddi Que Iskhandar, Md Kamrul Hasan, Giuseppe Caruso, Jiahao Chen, Basma Elsaka, Shilby Baby, Dennis Löber, Thomas Kusserow, Jost Adam, Hartmut Hillmer
Publikováno v:
Photonics, Vol 11, Iss 3, p 253 (2024)
This work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material s
Externí odkaz:
https://doaj.org/article/82d546093fa04711b4aacefb35cb7f87
Autor:
Xiaohui Yang, Philipp Kästner, Eireen Käkel, Marek Smolarczyk, Shujie Liu, Qingdang Li, Hartmut Hillmer
Publikováno v:
Applied Sciences, Vol 13, Iss 2, p 1118 (2023)
For different metals and varying geometries, this paper presents simulations of electrostatically actuated MEMS cantilevers regarding their influence on pull-in voltage and actuation speed. Three-dimensional electromechanical modeling including many
Externí odkaz:
https://doaj.org/article/7e34ef92ac4545839e2ece1dde5ef730