Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Marcus Wollenweber"'
Publikováno v:
25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014).
The gate module comprises arguably some of the most critical process steps in 28nm semiconductor device manufacturing. One key step involved is the final gates etch. Typically all chip manufacturers dedicate a large part of their metrology capacity t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::51b2bbf5472732503d82c9b3cbc0ac01
https://doi.org/10.1109/asmc.2014.6847010
https://doi.org/10.1109/asmc.2014.6847010
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXIII.
In an effort to keep scaling at the speed of Moore's law, novel methods are being developed to facilitate advanced semiconductor manufacturing at the 32nm node and beyond. One such method for enabling the creation of dense pitches beyond the current
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d3103407691cd720c248985bbc32c970
https://doi.org/10.1117/12.814349
https://doi.org/10.1117/12.814349
Autor:
Hartmut Worch, Thomas Hanke, Dieter Scharnweber, Konrad Gliesche, Marcus Wollenweber, Gerhilt Dr. Schmack, Sabine Boxberger, H. Domaschke
Publikováno v:
Tissue engineering. 12(2)
Controlling the differentiation of human mesenchymal stem cells (hMSC) and providing tissue functions in engineered constructs before implantation are major challenges. Beside the additives in culture media, the artificial niches inside a scaffold ca
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c988239328464165863f519eeaf9c4dc
https://pubmed.ncbi.nlm.nih.gov/16548693
https://pubmed.ncbi.nlm.nih.gov/16548693
Autor:
Marcus Wollenweber, Hagen Domaschke, Thomas Hanke, Sabine Boxberger, Gerhilt Schmack, Konrad Gliesche, Dieter Scharnweber, Hartmut Worch
Publikováno v:
Tissue Engineering; Feb2006, Vol. 12 Issue 2, p345-359, 15p
Autor:
Monika Kruse de Pacheco, Thomas Hanke, Marcus Wollenweber, Hartmut Worch, Dieter Scharnweber, Beatrice Burmeister, Michael Gelinsky
Publikováno v:
Scopus-Elsevier
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fba8a4b61434a20439500be46c664014
http://www.scopus.com/inward/record.url?eid=2-s2.0-0142027611&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-0142027611&partnerID=MN8TOARS
