Zobrazeno 1 - 2
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pro vyhledávání: '"Marcus Pfeffer"'
Autor:
Ferenc Korsós, Krisztian Kis-Szabo, Eric Don, Aron Pap, Tibor Pavelka, Cyrille Laviron, Marcus Pfeffer, Edmund G. Seebauer, Susan B. Felch, Amitabh Jain, Yevgeniy V. Kondratenko
Publikováno v:
AIP Conference Proceedings.
Application of the Junction Photovoltage (JPV) method for metrology of ultra‐shallow implant (USJ) has been well documented. In this paper we report the application of the JPV method to control implant processes which create an electrically active
Autor:
David Sotta, Tibor Pavelka, Richard Oechsner, Eric Don, Aron Pap, C. Laviron, Christophe Wyon, Marcus Pfeffer, Peter Tutto
Publikováno v:
AIP Conference Proceedings.
This paper presents results obtained using a Junction Photo‐Voltage (JPV) method optimized for characterization of the combined implant‐annealing process. The tool was found to be particularly suited to measurement of ultra‐shallow junction she