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pro vyhledávání: '"Marcus Lippold"'
Publikováno v:
ACS Applied Materials & Interfaces. 7:8733-8742
The wet-chemical treatment of silicon wafers is an important production step in photovoltaic and semiconductor industries. Solutions containing hydrofluoric acid, ammonium peroxodisulfate, and hydrochloric acid were investigated as novel acidic, NOx-
Autor:
Florian Buchholz, Edwin Kroke, Florian Honeit, Marcus Lippold, Eckard Wefringhaus, Christoph Gondek
Publikováno v:
Solar Energy Materials and Solar Cells. 127:104-110
The reactivity of HF(40 wt%)–HNO3(100 wt%)–H2SO4(97 wt%) etching mixtures towards conventional SiC-slurry and diamond-wire sawn silicon wafers has been studied. Sulfuric acid-rich mixtures exhibit adequate etching rates (r
Publikováno v:
The Journal of Physical Chemistry C. 118:2044-2051
In semiconductor and photovoltaic industries numerous process steps deal with etching and silicon surface modification. The present study focuses on the reactivity of HF-H2O2-based mixtures toward silicon surfaces in a wide range of concentrations. T
Publikováno v:
Zeitschrift für Naturforschung B. 66:155-163
The reaction behavior of HF-HNO3-H2O etching mixtures, which are frequently used for texturing silicon surfaces, is significantly influenced by the addition of sulfuric acid. For high concentrations of sulfuric acid, nitronium ions NO2 + ions have be
Publikováno v:
ACS applied materialsinterfaces. 7(16)
The wet-chemical treatment of silicon wafers is an important production step in photovoltaic and semiconductor industries. Solutions containing hydrofluoric acid, ammonium peroxodisulfate, and hydrochloric acid were investigated as novel acidic, NOx-