Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Marco Künne"'
Publikováno v:
Journal of Optical Microsystems. 2
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f8bb2c9b2f8428ee5342e6313f4169d9
https://doi.org/10.1117/1.jom.2.4.044501
https://doi.org/10.1117/1.jom.2.4.044501
Publikováno v:
tm - Technisches Messen. 88:s65-s70
The 3D transfer characteristics of interference microscopes and their effect on the interference signals occurring at surface slopes are studied. The interference image stacks acquired during a depth scan are 3D Fourier transformed. This allows a com
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7a1f2e23700daccda72be31bf5c0eda7
https://doi.org/10.1515/teme-2021-0051
https://doi.org/10.1515/teme-2021-0051
Publikováno v:
Mesophotonics: Physics and Systems at Mesoscale.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::472c4a58b19529646d4cc371a1f02f24
https://doi.org/10.1117/12.2622892
https://doi.org/10.1117/12.2622892
Publikováno v:
Optical Measurement Systems for Industrial Inspection XII.
As the requirements concerning lateral resolution, robustness and reliability continuously increase, appropri- ate modeling of coherence scanning interferometry (CSI) as an important method prerequisite of virtual CSI instruments gains in importance.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::976058b579588b58fd4c151c6930e079
https://doi.org/10.1117/12.2593347
https://doi.org/10.1117/12.2593347
Autor:
Ricky Schulze, Sebastian Hagemeier, Marco Künne, Corvin Danzglock, Markus Siebert, Nils Reinhold, Tobias Pahl, Peter Lehmann
Publikováno v:
Modeling Aspects in Optical Metrology VIII.
Coherence scanning interferometry is one of the most frequently used techniques for optical profiling due to its outstanding axial resolution. However, optical profilers suffer from systematic deviations caused by their transfer characteristics and d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5c3de978844eeab16ce7e3557d3537ad
https://doi.org/10.1117/12.2592617
https://doi.org/10.1117/12.2592617
Publikováno v:
Journal of Physics: Photonics. 3:014006
If high numerical apertures are used in coherence scanning interferometry, an extension of the interference signal’s spectral distribution to lower frequencies can be observed. Depending on the slope of the measured surface interference signal cont
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::72ab898ef4988f422c4efef410c15849
https://doi.org/10.1088/2515-7647/abda15
https://doi.org/10.1088/2515-7647/abda15