Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Marco Eckstein"'
Autor:
Christian Koppka, Bernd Hähnlein, Frank Schwierz, Jörg Pezoldt, Sebastian Thiele, Yan Mi, Marco Eckstein, Rui Xu, Yong Lei
Publikováno v:
Materials Science Forum. 924:506-510
Aluminium oxide was deposited on silicon, silicon carbide and epitaxial graphene grown on silicon carbide by atomic layer deposition using a standard MOCVD equipment. The morphology and the electrical properties of the aluminium oxide layers on both
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::37df263b220f5d9fbbebf818bdeace15
https://doi.org/10.4028/www.scientific.net/msf.924.506
https://doi.org/10.4028/www.scientific.net/msf.924.506
Publikováno v:
Materials Science Forum. 897:727-730
Epitaxial graphene on semiinsulating silicon carbide was grown using a high temperature method at atmospheric pressure in argon atmosphere. The temperature dependence of the layer quality was analysed using Raman and infrared spectroscopy. It is demo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fc7662402cb0a27501c2df669cf72e6e
https://doi.org/10.4028/www.scientific.net/msf.897.727
https://doi.org/10.4028/www.scientific.net/msf.897.727