Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Marco, Etter"'
Publikováno v:
Praxis. 104(21)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::415e0df9250de85cd0a9c83c4b1a667b
https://pubmed.ncbi.nlm.nih.gov/26463902
https://pubmed.ncbi.nlm.nih.gov/26463902
Autor:
Marc-A. Nicolet, Matthias Meier, Valerio Romano, Nico Onda, Dietmar Bertsch, Alex Dommann, Marco Etter, Martin Gutsche
Publikováno v:
Microelectronic Engineering. 83:2234-2237
We have studied experimentally the trimming of amorphous Ta"4"2Si"1"3N"4"5 films of about 250nm thickness deposited by reactive radiofrequency sputtering of a Ta"5Si"3 target on 3 inch Si wafers with infrared laser-generated pulses of [email protecte
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8f1b57b5a7b4a8c4d659f27452a139bf
https://doi.org/10.1016/j.mee.2006.10.010
https://doi.org/10.1016/j.mee.2006.10.010
Publikováno v:
Praxis. 104:1225-1225
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fa57fe8deac01b63332e3a78d85683bb
https://doi.org/10.1024/1661-8157/a002172
https://doi.org/10.1024/1661-8157/a002172