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Autor:
Rafael Ramírez-Bon, Manuel Quevedo-Lopez, R. Sánchez-Zeferino, L. A. Baldenegro-Pérez, M. I. Medina-Montes, Lizeth Rojas-Blanco, Marcelino Becerril-Silva
Publikováno v:
Solid-State Electronics. 123:119-123
ZnO thin films were processed by radio frequency magnetron sputtering at room temperature on p-Si/SiO2 substrates under pure argon (Ar:O2 = 100:0 vol.%) and argon–oxygen mixture (Ar:O2 = 99:1 vol.%) gas environment. Morphological, optical and elect