Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Marcel Stehli"'
Publikováno v:
IEEE Transactions on Automation Science and Engineering. 17:475-489
Machines need to be individually qualified to run lots of certain families in semiconductor wafer fabrication facilities (wafer fabs). A qualification time window that lasts a couple of days is associated with each family and each tool. The time wind
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::15ea0f6b3af02ba74c9a87e5e3acb289
https://doi.org/10.1109/tase.2019.2935469
https://doi.org/10.1109/tase.2019.2935469
Autor:
Marcel Stehli, Robert Barlovic
Publikováno v:
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
The verification of a new or changed recipe is a common process control task in a semiconductor factory. It is also a prime example of the demanding integration challenges that Advanced Process Control (APC) is facing today. State-of-the-art process
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9882bccdf539b2e32beb2b412ef055ee
https://doi.org/10.1109/asmc51741.2021.9435737
https://doi.org/10.1109/asmc51741.2021.9435737
Autor:
Gottfried Nieke, Karlheinz Bock, Marcel Stehli, Detlef Pabst, Christian Maleck, Meinhard Schulze
Publikováno v:
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
In this paper we will present a multi-stage scheduling approach to generate robust schedules for a challenging aspect of semiconductor manufacturing called time-link areas. A time-link is a technologically induced time constraint between one or more
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6fc4a481b76258cd01725346c923aa90
https://doi.org/10.1109/asmc.2019.8791779
https://doi.org/10.1109/asmc.2019.8791779
Publikováno v:
2018 Winter Simulation Conference (WSC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::13cf8ccea03e97656173f53d3a169bce
https://doi.org/10.1109/wsc.2018.8632404
https://doi.org/10.1109/wsc.2018.8632404
Publikováno v:
2018 Winter Simulation Conference (WSC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c0b4a8a5d21cc6a449a406f1e6874aa5
https://doi.org/10.1109/wsc.2018.8632280
https://doi.org/10.1109/wsc.2018.8632280
Publikováno v:
CASE
In this paper, we discuss requalification strategies for stepper tools in semiconductor wafer fabrication facilities (wafer fabs). Before processing lots on steppers, the steppers have to be qualified. A mathematical programming formulation is used p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9d1f9f55051ed08a314d338f012b422b
https://doi.org/10.1109/coase.2018.8560476
https://doi.org/10.1109/coase.2018.8560476
Publikováno v:
2016 Winter Simulation Conference (WSC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5bf2c9894ee8294a3dbd3c7d8793965e
https://doi.org/10.1109/wsc.2016.7822299
https://doi.org/10.1109/wsc.2016.7822299
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Advanced process control (APC) is widely used in semiconductor manufacturing to adjust process parameters, ensuring a high product quality, while WIP flow optimization systems for scheduling & dispatching make decisions by assigning lots to tools for
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::87d3babffb81243bb68314c751cb44c9
https://doi.org/10.1109/asmc.2015.7164449
https://doi.org/10.1109/asmc.2015.7164449
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Chaos theory has been a young research field with successful applications to a variety of areas. Even though former publications have assessed the question if production systems behave chaotic, little work has been published on real life production s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::744b77ec26979356964ca8a0419d34ca
https://doi.org/10.1109/asmc.2015.7164493
https://doi.org/10.1109/asmc.2015.7164493
Publikováno v:
Production Planning & Control. 17:701-716
In this paper, we describe a hierarchically organised multi-agent-system prototype that is used for production control of semiconductor wafer fabrication facilities (wafer fabs). Starting from requirements for modern production control systems and ad
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::db1f9b7d403ff0071892fae348baef09
https://doi.org/10.1080/09537280600901269
https://doi.org/10.1080/09537280600901269