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Autor:
Moritz Eggeling, Michael Henfling, Dana Seyringe, Svenja Plesshoff, Alejandro Maese-Novo, Paul Muellner, Martin Sagmeister, Florian Vogelbacher, Rainer Hainberger, Marcel Sladecek, Jochen Kraft, Elisabet Rank, Jan Vaupot, Wolfgang Drexler, Sabine Trupp, Stefan Nevlacsil
Publikováno v:
Optical Sensors and Sensing Congress
We report the development of CMOS compatible PECVD silicon nitride waveguide based photonic integrated circuits and their application for optical coherence tomography (OCT) and colorimetric gas sensing.