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Publikováno v:
Journal of Sensors and Sensor Systems, Vol 6, Pp 367-374 (2017)
The concept of the micro-structured vacuum sensor presented in this article is the measurement of the electrical conductivity of thinned gases in order to develop a small, economical and quite a simple type of vacuum sensor. There are already some ap
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bb0fd2593cdadb42c4f4be1c8cbdd213
https://doi.org/10.5194/jsss-6-367-2017
https://doi.org/10.5194/jsss-6-367-2017
