Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Marcel F. Heertjes"'
Publikováno v:
IEEE Transactions on Automation Science and Engineering. 20(1):718-732
The operation time of an ideal reliable wafer scanner model is defined at the die level where the actual exposure process takes place as the time unit per die, or at the wafer substrate level as the time unit per wafer substrate. Therefore, the machi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6249d0df7fc0fe368bd2d8bb0dc6dd49
https://research.tue.nl/en/publications/28058a7f-12d1-45ab-8d27-f1040a012a6a
https://research.tue.nl/en/publications/28058a7f-12d1-45ab-8d27-f1040a012a6a
Publikováno v:
Mechanical Systems and Signal Processing, 186:109769. Academic Press Inc.
We present a framework that allows designing point-to-point closed-form trajectories and identifying flexible modes, jointly. The impulse response of a k-cascaded second-order notch filter is altered by composing it with a polynomial function of even
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::66d04edc19117fda5dd498b1b4a45567
https://research.tue.nl/nl/publications/62abcd34-6fbc-4318-83a2-c154733b6ea6
https://research.tue.nl/nl/publications/62abcd34-6fbc-4318-83a2-c154733b6ea6
