Zobrazeno 1 - 10
of 12
pro vyhledávání: '"Marcel Beckers"'
Autor:
Natalia V. Davydova, Lieve van Look, Vincent Wiaux, Joost Bekaert, Frank Timmermans, Eelco van Setten, Bram Slachter, Laura L. Huddleston, Claire van Lare, Rongkuo Zhao, Dezheng Sun, Ming-Chun Tien, Marcel Beckers, Simon van Gorp, Cees Lambregts, Chung-Tien Li, Arthur van de Nes, Koen D'Havé, Tatiana Kovalevich, Diederik de Bruin, Stephen Hsu, Rene Carpaij
Publikováno v:
Optical and EUV Nanolithography XXXVI.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4dab72bbb0e94903157e9929591fe380
https://doi.org/10.1117/12.2658511
https://doi.org/10.1117/12.2658511
Autor:
Natalia V. Davydova, Vincent Wiaux, Joost Bekaert, Frank J. Timmermans, Bram Slachter, Tatiana Kovalevich, Eelco van Setten, Marcel Beckers, Simon van Gorp, Rongkuo Zhao, Dezheng Sun, Ming-Chun Tien, Hoon Ser, Diederik de Bruin, Stephen D. Hsu, Rene Carpaij
Publikováno v:
International Conference on Extreme Ultraviolet Lithography 2022.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::26d488bca49883dacb2615972fb0652d
https://doi.org/10.1117/12.2653388
https://doi.org/10.1117/12.2653388
Cross-platform (NXE-NXT) machine-to-machine overlay matching supporting next node chip manufacturing
Autor:
Marcel Beckers, Niels Lammers, Marcel Mastenbroek, Jean Phillippe van Damme, Laurens van Bokhoven, Cathy Wang, Shin-Rung Peng, Wilson Tzeng, Li-Jui Chen, Chun-Kuang Chen, Albert Mollema, Harald Petrus Cornelis Vos, Floris Teeuwisse, Ting-Ju Yueh, Hsueh-Hung Wu, Theo Thijssen, Alexander Padi, Hsiao-Lan Chen, Chia-Wei Hung, Miao-Chi Chen, Leon Martin Levasier, John Lin, Robin Tijssen, Kevin Cheng
Publikováno v:
Optical Microlithography XXXI
EUV lithography enables the transition from multiple patterning in DUV back to single patterning in EUV, with the associated cost benefit. While imaging and patterning becomes easier with EUV, cross-platform overlay performance needs to be taken into
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e03f955c974980f6f1850dc5efe39104
https://doi.org/10.1117/12.2297387
https://doi.org/10.1117/12.2297387
Autor:
Marcel Beckers, Marcel Mathieu
Publikováno v:
Bulletin des Sociétés Chimiques Belges. 60:512-515
Il nous a paru utile de donner une breve description de l'appareil simple qui nous a permis d'obtenir, a partir d'une eau distillee ordinaire, en un seul tour de distillation et avee un rendement de 50 a 80%, une eau dont la conductivite atteint 6.10
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e8731c58b203bad195c90d5cd354a16c
https://doi.org/10.1002/bscb.19510600905
https://doi.org/10.1002/bscb.19510600905
Autor:
Christian Wagner, Jo Finders, Milos Popadic, Sjoerd Lok, Koen de Peuter, Arthur Winfried Eduardus Minnaert, Rudy Peeters, Nigel R. Farrar, Chris de Ruijter, Roderik van Es, Alexander Schafgans, Daniel J. W. Brown, Ron Kool, Noreen Harned, Herman Boom, Eelco van Setten, Jörg Mallmann, Martin Lin, Martijn van Noordenburg, Daniel Smith, Frank Y. S. Chuang, Alberto Pirati, Roger Huang, Marcel Beckers, Judon Stoeldraijer, David C. Brandt, Carmen Zoldesi, Hans Meiling
Publikováno v:
SPIE Proceedings.
Multiple NXE:3300 are operational at customer sites. These systems, equipped with a Numerical Aperture (NA) of 0.33, are being used by semiconductor manufacturers to support device development. Full Wafer Critical Dimension Uniformity (CDU) of 1.0 nm
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3dac5fa09e9788067c5cca348cec8956
https://doi.org/10.1117/12.2085912
https://doi.org/10.1117/12.2085912
Publikováno v:
Journal of Polymer Science, Part A: Polymer Chemistry, 43(4), 726-732. Wiley
Acrylic acid (AA) is used in many emulsion polymerization formulations to improve the colloidal stability during and after the production of latex products. Theoretically, the improved stability originates from electrostatic repulsion complemented wi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4d46386352a27f4e997bccb66bbef133
https://research.tue.nl/en/publications/bd130f43-0f6d-4c61-9f94-e4b59355f723
https://research.tue.nl/en/publications/bd130f43-0f6d-4c61-9f94-e4b59355f723
Publikováno v:
Physics of Fluids, 15(4), 1033-1045. American Institute of Physics
The evolution of initially axisymmetric shielded pancake-like vortices in a nonrotating linearly stratified fluid has been investigated experimentally and numerically. The evolution process and the shape of tripoles in laboratory experiments depend o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::27cde7e507485dc46d7e59fabd17d417
https://research.tue.nl/en/publications/d03d4c22-a6dd-40bc-aacb-7e8383631c00
https://research.tue.nl/en/publications/d03d4c22-a6dd-40bc-aacb-7e8383631c00
Autor:
Guangqin Chen, Leon Verstappen, Jaap Karssenberg, Hannah Wei, Jan Mulkens, Marcel Beckers, Stephen Hsu
Publikováno v:
SPIE Proceedings.
EUV lithography is expected to be introduced in volume manufacturing at the 10-nm and 7-nm node. Especially in these first EUV nodes, critical layer patterning will be balanced with the use of ArF immersion. As a consequence a good overlay and placem
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::68163ac47a5d118857c30e5bfc3d2017
https://doi.org/10.1117/12.2048314
https://doi.org/10.1117/12.2048314
Publikováno v:
Journal of Fluid Mechanics. 433:1-27
The dynamics and the three-dimensional structure of vortices in a linearly stratified, non-rotating fluid are investigated by means of laboratory experiments, an analytical model and through numerical simulations. The laboratory experiments show that
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1a988a853359bc5e9f418b39523eae02
https://doi.org/10.1017/s0022112001003482
https://doi.org/10.1017/s0022112001003482
Publikováno v:
Physics of Fluids, 14(2), 704-720. American Institute of Physics
The interaction between two shielded monopolar vortices has been investigated experimentally in a nonrotating linearly stratified fluid and by full three-dimensional (3D) numerical simulations. The characteristic Reynolds and Froude numbers in the ex
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::faeaf0e5feb94409aa911ec3c25c746d
https://research.tue.nl/nl/publications/68a5912c-436c-4c73-90bf-f3437b2b63b6
https://research.tue.nl/nl/publications/68a5912c-436c-4c73-90bf-f3437b2b63b6
