Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Marc Füldner"'
Publikováno v:
IEEE Sensors Journal. 5:857-863
In this paper, advanced membrane designs are simulated in order to improve the sensitivity of micromachined silicon condenser microphones. Analytical analyzes and finite element simulations have been carried out to derive algebraic expressions for th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f7689133fe625ff1f26d42757c7e200f
https://doi.org/10.1109/jsen.2004.841449
https://doi.org/10.1109/jsen.2004.841449
Publikováno v:
Journal of Micromechanics and Microengineering. 14:S86-S89
This paper presents the improvement of the signal-to-noise ratio of a silicon microphone by utilizing a high-impedance load resistor. A model is described which considers the acoustical and electrical parts of the microphone. Based on an equivalent c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::251408b78ccfd4464694d9e5f24d05e7
https://doi.org/10.1088/0960-1317/14/9/015
https://doi.org/10.1088/0960-1317/14/9/015
Autor:
Marc Füldner
Publikováno v:
Tagungsband.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4aef5fa8e2bd6a70412a887cdc851c42
https://doi.org/10.5162/sensoren2012/1.1.1
https://doi.org/10.5162/sensoren2012/1.1.1
Publikováno v:
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.
This paper presents a Spice based model of a silicon microphone system. The model considers the acoustical, the mechanical as well as the electrical behaviour. The simulation results are compared with the measurements to focus on the well understood
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::23ded42834253895e81a6cab65f07679
https://doi.org/10.1109/mems.2004.1290638
https://doi.org/10.1109/mems.2004.1290638
Publikováno v:
IEEE Symposium on Ultrasonics, 2003.
We present a newly developed computer aided engineering (CAE) tool for the design of capacitative micromachined sound and ultrasound transducers. The numerical scheme is based on the finite element (FE) method and takes all relevant nonlinearities (g
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::340439230d65d9d9a0cc2b80ba063cea
https://doi.org/10.1109/ultsym.2003.1293303
https://doi.org/10.1109/ultsym.2003.1293303
Publikováno v:
Transducers ’01 Eurosensors XV ISBN: 9783540421504
A new silicon condenser microphone process for low stress diaphragm is presented. The diaphragm is formed either by a polysilicon layer or by a monocrystalline silicon layer of a silicon on insulator substrate (SOI). Acoustical sensitivities up to 8.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d1d185450190b43630c41fa87e87b2ea
https://doi.org/10.1007/978-3-642-59497-7_29
https://doi.org/10.1007/978-3-642-59497-7_29
Autor:
Udo Schwalke, Peter Schon, Katja Bothe, Dariusch Hadawi, Ingold Dipl Ing Janssen, Marc Füldner, Walter Zatsch
Publikováno v:
Japanese Journal of Applied Physics. 38:2232
In this work, through-the-gate implantation (TGI) of channel- and well-doping is favorably combined with n+/p+ gate implantation. This approach offers an additional degree of freedom to optimize dual-workfunction gates independently from the fabricat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a3fea798af6d5fd04ef4a67478220bfa
https://doi.org/10.1143/jjap.38.2232
https://doi.org/10.1143/jjap.38.2232