Low-temperature fabrication of Ba1−xSrxTiO3 thin films with good dielectric properties on platinized silicon substrates

Autor: Emmanuel Defay, Marc Aid, C. Dubarry, Xiaohong Zhu, G. Le Rhun, B. Guigues

Publikováno v: Journal of the European Ceramic Society. 30:471-474

Ba 0.7 Sr 0.3 TiO 3 (BST) thin films 500 nm in thickness were prepared on technologically desirable Pt/TiO 2 /SiO 2 /Si(1 0 0) substrates by ion beam sputtering (IBS) and post-deposition annealing method. The effect of annealing temperature on the st

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e019488d81a2f4052083790b11e64a47
https://doi.org/10.1016/j.jeurceramsoc.2009.05.010

High pass filter with above IC integrated SrTiO3 high K MIM capacitors

Autor: Laurent Ulmer, Jean-Pierre Blanc, Emmanuel Defay, Bernard Andre, Emmanuelle Serret, Sophie Verrun, Philippe Delpech, Marc Aid, Pierre Garrec, Julie Guillan, Denis Pellissier, Pascal Ancey, David Wolozan

Publikováno v: Solid-State Electronics. 51:1624-1628

This paper describes realization and characterization of SrTiO 3 (STO) high K MIM capacitors above BiCMOS integrated circuit (IC). These capacitances are connected to IC and are used as coupling capacitors in order to realize a high pass filter. Surf

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::3cfe2cfb16c8c58c781527689b149dad
https://doi.org/10.1016/j.sse.2007.09.036

Tailoring the room temperature ferroelectric/paraelectric state in polycrystalline (Ba 0.70 Sr 0.30 )TiO 3 thin films for silicon compatible integration

Autor: Jiliang Zhu, Xiaohong Zhu, Emmanuel Defay, Marc Aid, Yinjuan Ren, Gwenael Le Rhun, Brahim Dkhil

Publikováno v: Ceramics International
Ceramics International, Elsevier, 2015, pp.14412-14418. ⟨10.1016/j.ceramint.2015.07.076⟩
Ceramics International, 2015, 41, pp.14412-14418. ⟨10.1016/j.ceramint.2015.07.076⟩

International audience; Polycrystalline (Ba 0.70 Sr 0.30)TiO 3 (BST) thin films were prepared by ion beam sputtering and postdeposition annealing method, and their crystallization kinetics was monitored in situ. It was found that 550 1C is a critical

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::023c04790e1f419b41bc436a8219e573
https://hal.archives-ouvertes.fr/hal-01260006

Observation of band gaps in the gigahertz range and deaf bands in a hypersonic aluminum nitride phononic crystal slab

Autor: Vincent Laude, Emmanuel Defay, M. Gorisse, Alexandre Reinhardt, G. Teissier, Marc Aid, Christophe Billard, Sarah Benchabane

Publikováno v: Applied Physics Letters
Applied Physics Letters, American Institute of Physics, 2011, 98, pp.4103. ⟨10.1063/1.3598425⟩
Applied Physics Letters, 2011, 98, pp.4103. ⟨10.1063/1.3598425⟩

International audience; We report on the observation of elastic waves propagating in a two-dimensional phononic crystal composed of air holes drilled in an aluminum nitride membrane. The theoretical band structure indicates the existence of an acoust

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::afac0afc1edd0c1b92a9d86d2625f99c
https://hal.archives-ouvertes.fr/hal-00639162

Bias controlled electrostrictive longitudinal resonance in X-cut lithium niobate thin films resonator

Autor: Alexandre Reinhardt, Emmanuel Defay, D. Mercier, Chrystel Deguet, Sylvain Ballandras, Marc Aid, M. Pijolat, Christophe Billard

Publikováno v: Applied Physics Letters
Applied Physics Letters, American Institute of Physics, 2011, 98 (23), pp.232902. ⟨10.1063/1.3598410⟩
Applied Physics Letters, 2011, 98 (23), pp.232902. ⟨10.1063/1.3598410⟩

International audience; In this letter, we show that a longitudinal acoustic wave can be generated in X-cut LiNbO(3) (LNO) thin films when a voltage bias is superimposed to the radio frequency signal. Although there is normally no coupling of this wa

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::573db682833b63dd5a32b8611b701cab
https://hal.archives-ouvertes.fr/hal-00611487/document