Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Mao-Sen Bai"'
Publikováno v:
Advanced Materials Research. :188-194
A novel faint signal processing method based on phase-lock amplification principle is developed to enhance the sensitivity of pump/probe-based laser generated and laser detected surface acoustic waves (LG/LD SAW) spectroscopy system. This novel metho
Publikováno v:
2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings.
Porous low-k materials are required for the advanced 45nm node and beyond ULSI interconnect system. The deteriorative mechanical properties of the porous materials must be evaluated accurately. Surface acoustic wave (SAW) technique can measure the Yo
Publikováno v:
2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings.
This paper established a new layered model to calculate the theoretical dispersion curve of SAWs propagating on the periodic porous SiO2 film on the Si substrate. In this model the periodic nanoporous SiO2 film is treated as transversal isotropic str
Publikováno v:
2006 8th International Conference on Solid-State & Integrated Circuit Technology Proceedings; 2006, pN.PAG, 1p