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pro vyhledávání: '"Mao, Wei Jhih"'
Autor:
Mao, Wei Jhih, 毛威智
104
This study presents two different CMOS-MEMS microphone designs with serpentine spring structure. The serpentine spring structure not only can decrease the stiffness of diaphragm but also can change the diaphragm motion into piston-type movem
This study presents two different CMOS-MEMS microphone designs with serpentine spring structure. The serpentine spring structure not only can decrease the stiffness of diaphragm but also can change the diaphragm motion into piston-type movem
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/13312543011966624441
Publikováno v:
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS); 1/1/2016, p1002-1005, 4p
