Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Manuel Dorfmeister"'
Publikováno v:
Proceedings, Vol 2, Iss 13, p 912 (2019)
This study reports on a novel bi-stable actuator with an integrated aluminum nitride (AlN) piezoelectric layer sandwiched between two electrodes. To achieve bistability, the membranes must exceed a characteristic compressive stress value, also called
Externí odkaz:
https://doaj.org/article/64befb619ff64dfea2de14b523b42faf
Publikováno v:
Proceedings, Vol 2, Iss 13, p 785 (2018)
In preliminary studies it could be shown that single crystalline silicon carbide wafers can be porosified with metal assisted photochemical etching. Furthermore, the generation of porous areas which are locally defined is possible with this method. B
Externí odkaz:
https://doaj.org/article/4fc2e09e284e409ea9c53b07c62ce3db
Autor:
Philipp Moll, Georg Pfusterschmied, Michael Schneider, Manuel Dorfmeister, Sebastian Knafl, Heinz D. Wanzenboeck, Ulrich Schmid
Publikováno v:
Journal of Microelectromechanical Systems. 31:372-383
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::57cfd80ac54bc6668bb695777ffbe4d2
https://doi.org/10.1109/jmems.2022.3163477
https://doi.org/10.1109/jmems.2022.3163477
Autor:
Adarsh S. Prasad, Louahab Noui, Manuel Dorfmeister, Franz Maier, Zhe Chen, Faraj Nassar, Vinicius Esteves da Costa, Gregor Schestak, Jörg Reitterer
Publikováno v:
Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::27b326b1db736d1ed16a91d04160612d
https://doi.org/10.1117/12.2655110
https://doi.org/10.1117/12.2655110
Publikováno v:
Journal of Microelectromechanical Systems. 29:948-953
This work presents a new type of piezoelectric micromachined ultrasonic transducer (PMUT) based on a bi-stable MEMS membrane structure with integrated aluminum nitride (AlN) actuators. By switching the membrane between both stable ground states, larg
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9e0261bc9a82d911d4b43b3c9777c69e
https://doi.org/10.1109/jmems.2020.3004243
https://doi.org/10.1109/jmems.2020.3004243
Autor:
Anna Balbekova, Jörg Reitterer, Gregor Schestak, Manuel Dorfmeister, Zhe Chen, Matthias Ley, Gerhard Schmid, Faraj Nassar
Publikováno v:
Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) II.
Laser beam scanners (LBS) are an emerging micro-display technology for augmented reality (AR) head-mounted displays (HMD), enabling small-form-factor and low-power display units with large field of view (FOV) and daylight-bright luminance, that are c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::82c58e443216f21221616d3f68420820
https://doi.org/10.1117/12.2576704
https://doi.org/10.1117/12.2576704
Publikováno v:
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).
In this paper, we demonstrate bistable switching of micromachined membranes with integrated piezoelectric thin film actuators in liquids with a dynamic viscosity up to 286 mPa·s. The membranes have diameters between 600 to 800 µm and a total layer
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8c1fccf17184168627fefa00f9482547
https://doi.org/10.1109/mems51782.2021.9375163
https://doi.org/10.1109/mems51782.2021.9375163
Publikováno v:
Sensors and Actuators A: Physical. 282:259-268
This paper reports on the characteristic behaviour of bistable MEMS membranes before, during and after switching between the two ground states. For this purpose, silicon membranes with a diameter in the range of 300–800 μm and a thickness in the r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b5b0f8b8dd878464e761df0193bf5bd7
https://doi.org/10.1016/j.sna.2018.09.038
https://doi.org/10.1016/j.sna.2018.09.038
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
This work reports on a novel concept for switching between the two stable states of compressively pre-stressed bistable MEMS membranes using integrated piezoelectric scandium aluminum nitride (Sc x AlN 1-x ) thin film actuators. The minimum voltage n
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8c4b830bb987e886426b1f29085d365c
https://doi.org/10.1109/transducers.2019.8808203
https://doi.org/10.1109/transducers.2019.8808203
Publikováno v:
Proceedings, Vol 2, Iss 13, p 912 (2019)
This study reports on a novel bi-stable actuator with an integrated aluminum nitride (AlN) piezoelectric layer sandwiched between two electrodes. To achieve bistability, the membranes must exceed a characteristic compressive stress value, also called
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cee62fc0f31264f48306098ab9e152c1
https://doi.org/10.3390/proceedings2130912
https://doi.org/10.3390/proceedings2130912