Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Mantas Vaičiulis"'
Autor:
Jovan Maksimovic, Haoran Mu, Daniel Smith, Tomas Katkus, Mantas Vaičiulis, Ramūnas Aleksiejūnas, Gediminas Seniutinas, Soon Hock Ng, Saulius Juodkazis
Publikováno v:
Micromachines, Vol 14, Iss 3, p 550 (2023)
Ultra-short 230 fs laser pulses of a 515 nm wavelength were tightly focused onto 700 nm focal spots and utilised in opening ∼0.4–1 μm holes in alumina Al2O3 etch masks with a 20–50 nm thickness. Such dielectric masks simplify the fabrication o
Externí odkaz:
https://doaj.org/article/6e8c8fb1f37941ef8073ebfddedd8c0f
Autor:
Jovan Maksimovic, Haoran Mu, Daniel Smith, Tomas Katkus, Mantas Vaičiulis, Ramūnas Aleksiejūnas, Gediminas Seniutinas, Soon Hock Ng, Saulius Juodkazis
Ultra-short 230 fs laser pulses of 515 nm wavelength were tightly focused into 700 nm focal spots and utilised in opening ~ 0.4 − 1 μm holes in alumina Al2O3 etch masks with 20-50 nm thickness. Such dielectric masks simplify fabrication of photoni
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2e3b5e75d306cd4f3b5efff059267ed2
