Thermal catalytic etching of diamond by double-metal layers

Autor: Tran, D.D., Mannequin, C., Bonvalot, M., Traoré, A., Mariette, H., Sasaki, M., Gheeraert, E.

Publikováno v: In Diamond & Related Materials May 2024 145

Investigation of HfO2 and ZrO2 for Resistive Random Access Memory applications

Autor: Salaün, A., Grampeix, H., Buckley, J., Mannequin, C., Vallée, C., Gonon, P., Jeannot, S., Gaumer, C., Gros-Jean, M., Jousseaume, V.

Publikováno v: In Thin Solid Films 15 December 2012 525:20-27

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Cyclic BCl3-based plasma treatments for enhancing surface quality of (010) β-Ga2O3 substrates

Autor: Douest, Y., Mannequin, C., Ito, T., Ozaki, Y., Vallee, C., Gheeraert, E., Akimoto, K., Sasaki, M., Teramoto, T., Dussarat, C.

Publikováno v: Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10)
Joint Conference of XXXIV International Conference on Phenomena in Ionized Gases (XXXIV ICPIG) and the 10th International Conference on Reactive Plasmas (ICRP-10), Jul 2019, Sapporo, Japan

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::dbecd9ecfd75818c28232af2ab72b05a
https://hal.univ-grenoble-alpes.fr/hal-02338953

Development of Atomic Layer Etching (ALEt) for GaN-based materials

Autor: You, Congying, Mannequin, C., Jacopin, G., Chevolleau, T., Durand, C., Vallee, C., Mariette, H., Sasaki, M., Gheeraert, E.

Publikováno v: International Workshop on Nitride Semiconductors
International Workshop on Nitride Semiconductors, Nov 2018, Kanazawa, Japan

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::908e6c611d9be26330c98aa87c42247c
https://hal.archives-ouvertes.fr/hal-02008012